AMAT Applied Materials DNP-CPCI-2扫描仪模块 PDF资料
1.产 品 资 料 介 绍:
产品概述
AMAT Applied Materials DNP-CPCI-2 扫描仪模块是一种基于 CompactPCI (CPCI) 总线架构的专用控制模块,应用于半导体设备中作为高速数据采集与信号扫描的核心单元。该模块主要用于监测、采集并处理工艺过程中大量的模拟/数字信号,保证工艺控制的实时性和稳定性。它通常被安装在 CPCI 控制机箱内,与其他处理器板、I/O 板协同工作。
技术参数(推测整理)
总线接口:兼容 CompactPCI 2.x 标准,支持 32/64 位总线传输。
功能定位:作为“扫描仪模块”,具备多通道信号采集与同步扫描能力,适配工艺控制的高速要求。
信号类型:支持多路模拟输入 / 数字输入输出,可进行实时采集与分时扫描。
数据处理:可能集成 FPGA 或 DSP 资源,用于前端数据处理、滤波与缓冲。
同步特性:支持与工艺控制器、触发信号和外部时钟同步,实现多模块协调运行。
冷却方式:依靠 CPCI 机箱风冷散热,部分版本可能有散热片强化设计。
版本修订:DNP-CPCI-2 可能存在 Rev. A/B 等修订版本,不同版本在通道数、接口布局或固件上有所差异。
应用场景
半导体制造工艺监控:用于刻蚀、CVD、PVD 等工艺设备的信号采集和过程监测。
真空/气体/液体系统:扫描并采集传感器信号,如压力、流量、阀门状态等。
射频/电源监控:实时扫描 RF 匹配器、电源单元的反馈信号,用于闭环控制。
设备集成控制:与 CPCI 总线主控 CPU 板配合,组成完整的实时控制与采集系统。
产品优势
高速采集:具备多通道同步扫描功能,支持高频率数据采集,满足工艺快速响应需求。
模块化设计:采用 CPCI 插卡式设计,方便插拔更换和系统扩展。
兼容性好:符合 CPCI 总线标准,能够与其他 AMAT 控制模块及第三方模块无缝集成。
可靠性高:工业级器件与设计,确保在长时间高负荷工况下稳定运行。
诊断与维护便利:通常具备板载指示灯和自检功能,支持现场工程师快速定位问题。
AMAT Applied Materials DNP-CPCI-2扫描仪模块 英文介绍
Product Overview
The AMAT Applied Materials DNP-CPCI-2 scanner module is a dedicated control module based on the CompactPCI (CPCI) bus architecture, used in semiconductor devices as the core unit for high-speed data acquisition and signal scanning. This module is mainly used for monitoring, collecting, and processing a large number of analog/digital signals during the process, ensuring the real-time and stability of process control. It is usually installed inside the CPCI control chassis and works in conjunction with other processor boards and I/O boards.
Technical parameters (speculated and organized)
Bus interface: Compatible with CompactPCI 2. x standard, supports 32/64 bit bus transmission.
Functional positioning: As a "scanner module", it has the ability to collect multi-channel signals and synchronize scanning, adapting to the high-speed requirements of process control.
Signal type: Supports multiple analog inputs/digital inputs/outputs, capable of real-time acquisition and time-sharing scanning.
Data processing: may integrate FPGA or DSP resources for front-end data processing, filtering, and buffering.
Synchronization feature: Supports synchronization with process controllers, trigger signals, and external clocks to achieve coordinated operation of multiple modules.
Cooling method: relying on CPCI chassis air cooling for heat dissipation, some versions may have heat sink reinforcement design.
Version revision: DNP-CPCI-2 may have revised versions such as Rev. A/B, which may vary in terms of channel count, interface layout, or firmware.
Application scenarios
Semiconductor manufacturing process monitoring: used for signal acquisition and process monitoring of process equipment such as etching, CVD, PVD, etc.
Vacuum/gas/liquid system: Scan and collect sensor signals such as pressure, flow rate, valve status, etc.
RF/power monitoring: Real time scanning of feedback signals from RF matching devices and power units for closed-loop control.
Equipment integration control: Cooperate with the CPCI bus main control CPU board to form a complete real-time control and acquisition system.
Product advantages
High speed acquisition: equipped with multi-channel synchronous scanning function, supporting high-frequency data acquisition, meeting the requirements of rapid process response.
Modular design: Adopting CPCI plug-in card design, it is easy to plug and replace and expand the system.
Good compatibility: Complies with the CPCI bus standard and can seamlessly integrate with other AMAT control modules and third-party modules.
High reliability: Industrial grade devices and designs ensure stable operation under long-term high load conditions.
Convenient diagnosis and maintenance: usually equipped with onboard indicator lights and self checking functions, supporting on-site engineers to quickly locate problems.
AMAT Applied Materials DNP-CPCI-2扫描仪模块 产品展示
3.其他产品
IPMON01 电源监视器模块
HONEYWELL TC-FPCXX2电源模块
Foxboro H92 H92A049E0700转换器
4.其他英文产品
BENTLY 3500/25 149369-01 module
BENTLY 3500/32 125712-01 Relay module
BENTLY 3500/40M 140734-01 Machinery Monitoring System
710-653699-20 | 8005-AN-108 | 710-809156-000 |
710-652697-20 | 8055-SCP-655X | 710-678525-00 |
710-652010-20 | 8055-SCP-655R | 531X310SNDAEG1 |
710-651090-20 | 8055-SCP-655 | 820-06553-000 |
710-650879-20 | 8055-SCP-654 | 4007-001-0089 |
710-650204-20 | 8055-SCP-453 | 710-650074-20 |
710-650201-20 | 8055-SCP-654R | F31X170TBSADG1 |
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