AMAT Applied Materials 903172-001输入输出模块 PDF资料
1.产 品 资 料 介 绍：
产品概述
AMAT Applied Materials 903172-001 输入/输出模块（Liquid Source I/O PCB / I/O Board）是用于半导体工艺设备中液体供给与管理子系统的专用电路板。该模块负责液源相关传感器与执动器的信号采集、驱动输出与与主控系统的接口通信，是液体源控制和监测回路的关键电子单元。
技术特点（推测）
I/O 类型混合：通常包含数字输入/输出和模拟输入/输出通道，用于采集流量、压力、液位等模拟量，以及读取阀位、限位等数字量，驱动阀门或泵等执行器。
信号调理与隔离：具备信号缓冲、滤波与隔离电路，保证弱信号在噪声环境下可靠传输并保护主控。
驱动能力：输出端具有驱动级（开集电极、继电器驱动或小功率驱动器），可直接控制现场小型执行器或通过中间继电器控制更大负载。
总线/背板接口：带有与设备主控单元连接的标准插接/背板接口，用于数据与电源传输，兼容设备内部通信结构。
诊断与状态指示：可能含有自检、故障指示和LED状态指示用于现场快速故障定位。
版本管理：存在修订版本（例如 Rev B），不同修订在元件选型、接口脚位或布线上可能有差别，需确认与主控/底盘兼容性。
工业级可靠性：元器件选型与PCB工艺符合半导体设备的高可靠性和长期运行要求，考虑到抗干扰与温度稳定性。
应用场景
液体源（chemicals / liquid delivery）控制子系统的传感与驱动。
控制并监测化学品输送泵、比例阀、电磁阀、流量计、压力传感器与液位开关等。
半导体刻蚀、沉积或清洗工艺中需要精细管理液体配比与供给的设备。
与机台主控板或真空/气体管理底盘配合，作为设备液体回路的现场接口卡。
AMAT Applied Materials 9090-00962真空控制底盘 英文介绍
Product Overview
AMAT Applied Materials 903172-001 Input/Output Module (Liquid Source I/O PCB/I Board) is a specialized circuit board used for liquid supply and management subsystems in semiconductor process equipment. This module is responsible for signal acquisition, drive output, and interface communication with the main control system of liquid source related sensors and actuators. It is a key electronic unit for liquid source control and monitoring circuits.
Technical characteristics (speculation)
I/O type mixing: usually includes digital input/output and analog input/output channels, used to collect analog quantities such as flow rate, pressure, liquid level, as well as read digital quantities such as valve position and limit, and drive actuators such as valves or pumps.
Signal conditioning and isolation: equipped with signal buffering, filtering, and isolation circuits to ensure reliable transmission of weak signals in noisy environments and protect the main control.
Drive capability: The output end has a drive stage (open collector electrode, relay drive or low-power driver), which can directly control small actuators on site or control larger loads through intermediate relays.
Bus/Backplane Interface: Equipped with standard plug/backplane interfaces for connecting to the device's main control unit, used for data and power transmission, compatible with the internal communication structure of the device.
Diagnosis and status indication: may include self check, fault indication, and LED status indication for rapid on-site fault location.
Version management: There are revised versions (such as Rev B), and different revisions may have differences in component selection, interface pins, or wiring. It is necessary to confirm compatibility with the main control/chassis.
Industrial grade reliability: The selection of components and PCB process meet the high reliability and long-term operation requirements of semiconductor equipment, taking into account anti-interference and temperature stability.
Application scenarios
Sensing and driving of the chemicals/liquid delivery control subsystem.
Control and monitor chemical transfer pumps, proportional valves, solenoid valves, flow meters, pressure sensors, and level switches.
Equipment that requires precise management of liquid ratio and supply in semiconductor etching, deposition, or cleaning processes.
Cooperate with the machine control board or vacuum/gas management chassis as the on-site interface card for the equipment liquid circuit.
AMAT Applied Materials 9090-00962真空控制底盘 产品展示
3.其他产品
FOXBORO P0917JJ 现场控制处理器
IPSYS01电源系统模块
B&R 2005 3CP152.9可编程式逻辑控制器
4.其他英文产品
BENTLY 135489-04 Temperature module
BENTLY 136711-01 Temperature module
BENTLY 136719-01 displacement module
| 720-23475-001 | 8030-ROM-122 | X-AO 16 51 |
| 720-23461-000 | CACR-SR20BB1AM | X-AO 16 01 |
| 720-21901-003 | 6SC6103-0SG31 | X-DO 12 51 |
| 712-404056-00 | 6SC9811-4BF10 | X-DO 12 02 |
| 710-806051-01 | 6DD1683-0CH0 | X-DO 24 02 |
| 710-806050-01 | 8020-SCP-424 | X-DO 24 01 |
| 710-805314-00 | 8020-SCP-423 | X-DO 32 51 |
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