AMAT Applied Materials 9090-00962真空控制底盘 PDF资料
1.产 品 资 料 介 绍:
产品概述
AMAT Applied Materials 9090-00962 真空控制底盘(Vacuum Control Chassis)是应用于半导体工艺设备中的专用部件,主要用于承载和管理真空控制系统的电子模块及相关接口。它作为底盘框架,为真空系统的信号处理、电源分配以及接口布线提供统一平台。
技术特点(推测)
由于公开资料有限,详细参数不对外公开,但根据同类产品及真空控制底盘的设计特点,可归纳其可能特征:
结构功能:提供真空控制模块的固定和对齐安装位置。
电气支持:集成电源分配、信号线缆管理和接地回路。
兼容性:支持 AMAT 特定型号的真空控制卡件与电子模块。
屏蔽与安全:具备电磁屏蔽与接地设计,减少噪声与干扰。
版本修订:存在不同修订版本(如 Rev. A、Rev. B),不同版本在接口或布局上可能有细微差别。
应用场景
半导体制造设备中的真空系统控制
例如离子注入机、薄膜沉积设备、刻蚀系统等需要高真空环境的工艺模块
真空阀门、压力传感器、泵控制的电气与信号接口管理
系统电源与信号的集中分配和保护
产品优势
集成化设计:将多路真空控制模块集中安装,提高系统布线与维护效率
可靠性高:底盘材质与设计符合真空系统长期运行的要求
模块化维护:支持更换单个模块或电路卡件,减少停机时间
兼容性:为 Applied Materials 的特定设备型号量身定制,确保系统整体性能与稳定性
AMAT Applied Materials 9090-00962真空控制底盘 英文介绍
Product Overview
AMAT Applied Materials 9090-00962 Vacuum Control Chassis is a specialized component used in semiconductor process equipment to carry and manage electronic modules and related interfaces of vacuum control systems. It serves as a chassis framework, providing a unified platform for signal processing, power distribution, and interface wiring of vacuum systems.
Technical characteristics (speculation)
Due to limited public information, detailed parameters are not disclosed to the public. However, based on the design characteristics of similar products and vacuum controlled chassis, their possible features can be summarized as follows:
Structural function: Provide fixed and aligned installation positions for vacuum control modules.
Electrical support: Integrated power distribution, signal cable management, and grounding circuits.
Compatibility: Supports AMAT specific models of vacuum control cards and electronic modules.
Shielding and Safety: Equipped with electromagnetic shielding and grounding design to reduce noise and interference.
Version revision: There are different revision versions (such as Rev. A, Rev. B), which may have slight differences in interface or layout.
Application scenarios
Vacuum System Control in Semiconductor Manufacturing Equipment
For example, process modules such as ion implantation machines, thin film deposition equipment, etching systems, etc. that require high vacuum environments
Electrical and signal interface management for vacuum valves, pressure sensors, and pump control
Centralized distribution and protection of system power and signals
Product advantages
Integrated design: Install multiple vacuum control modules in a centralized manner to improve system wiring and maintenance efficiency
High reliability: The chassis material and design meet the requirements for long-term operation of the vacuum system
Modular maintenance: supports replacing individual modules or circuit cards to reduce downtime
Compatibility: Tailored for specific equipment models of Applied Materials to ensure overall system performance and stability
AMAT Applied Materials 9090-00962真空控制底盘 产品展示
3.其他产品
FOXBORO P0916MZ电缆
FOXBORO P0917JJ 现场控制处理器
IPSYS01电源系统模块
4.其他英文产品
BENTLY 125768-01 Monitor card
BENTLY 135473-01 Monitor module
BENTLY 135489-04 Temperature module
745-W2-P5-G5-HI-A-E-H | 8030-RIM-101 | X-FTA 009 02L |
745-W2-P5-G5-HI-A-E | 8030-R1M-185A | X-FTA 008 02L |
745-W2-P5-G5-HI-A | 8030-PV-28 | X-FTA 007 02L |
745-W2-P5-G5-HI | 8030-PS-70 | X-FTA 006 02L |
745-W2-P1-G1-LO-E | 8030-PS-51 | X-FTA 006 01L |
745-W2-P1-G1-HI-T-H | 8030-PS-41 | X-FTA 005 02L |
本篇文章出自瑞昌明盛自动化设备有限公司官网,转载请附上此链接:http://www.jiangxidcs