AMAT Applied Materials 0010-76968中心查找器模块 PDF资料
1.产 品 资 料 介 绍：
产品概述
AMAT Applied Materials 0010-76968 中心查找器模块（Center Finder Module）是一款用于半导体设备的精密定位和对位模块。它主要用于在晶圆或基板处理过程中，自动检测并校正工件的中心位置，为后续涂布、刻蚀、曝光或激光加工等工艺提供精确定位参考。该模块通常与控制器、伺服驱动模块及检测器模块协作，实现高精度自动化操作。
技术参数（典型特征，具体参数需参考实物或官方资料）
产品类型：自动中心查找 / 对位模块
主要功能：
自动检测晶圆或工件中心位置
输出定位数据至控制器或运动控制系统
与伺服驱动模块协作，实现精确对位
接口类型：电子信号接口，兼容 AMAT 控制系统
电气特性：
高精度位置检测与信号输出
快速响应，实现实时定位
工业级抗干扰设计
机械特性：模块化工业设计，适合安装在工艺设备中
环境适应性：适用于半导体洁净室及工艺环境
应用场景
晶圆/基板对位：在涂布、刻蚀或曝光工艺前自动寻找中心，确保工艺精度。
工艺自动化：与伺服驱动模块及控制器协作，实现闭环对位与运动控制。
系统集成：与检测器模块、伺服控制模块和 I/O 模块协作，实现设备整体自动化管理。
设备维护与升级：模块化设计便于更换和系统调试，提高生产效率。
AMAT Applied Materials 0010-76968中心查找器模块 英文介绍
Product Overview
AMAT Applied Materials 0010-76968 Center Finder Module is a precision positioning and alignment module used for semiconductor devices. It is mainly used to automatically detect and correct the center position of the workpiece during wafer or substrate processing, providing precise positioning reference for subsequent processes such as coating, etching, exposure, or laser processing. This module typically collaborates with the controller, servo drive module, and detector module to achieve high-precision automated operations.
Technical parameters (typical features, specific parameters need to refer to physical objects or official materials)
Product Type: Automatic Center Search/Alignment Module
Main functions:
Automatically detect the center position of wafers or workpieces
Output positioning data to the controller or motion control system
Collaborate with servo drive module to achieve precise alignment
Interface type: electronic signal interface, compatible with AMAT control system
Electrical characteristics:
High precision position detection and signal output
Quick response, achieving real-time positioning
Industrial grade anti-interference design
Mechanical characteristics: Modular industrial design, suitable for installation in process equipment
Environmental adaptability: suitable for semiconductor cleanrooms and process environments
Application scenarios
Wafer/substrate alignment: Automatically locate the center before coating, etching, or exposure processes to ensure process accuracy.
Process automation: Collaborate with servo drive modules and controllers to achieve closed-loop alignment and motion control.
System integration: Collaborate with detector modules, servo control modules, and I/O modules to achieve overall automated management of equipment.
Equipment maintenance and upgrade: Modular design facilitates replacement and system debugging, improving production efficiency.
AMAT Applied Materials 0010-76968中心查找器模块 产品展示
3.其他产品
PM865K01 3BSE031151R1处理器
BENTLY 3500/44M 176449-03U 振动监视器
FOXBORO P0917XV输出底座
4.其他英文产品
REF601 CE446BB1NH control panel
UNIOP TCM08A communication card
SCHENCK VEG20400 weighing controller
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