AMAT Applied Materials  0150-30266双射频滤波器模块 PDF资料 

1.产 品 资 料 介 绍：

产品概述

AMAT Applied Materials 0150-30266 双射频滤波器模块是一款用于半导体制造设备的射频信号处理模块。它主要功能是对射频信号进行滤波和隔离，保证射频功率源输出信号的纯净性，同时降低干扰对工艺的影响。该模块通常与射频匹配导航器、射频发生器接口模块及等离子弧控制板协作，确保等离子工艺稳定运行。

技术参数（典型特征，具体参数需参考实物或官方资料）

• 产品类型：双射频滤波器模块

• 主要功能：

• 对射频信号进行滤波与隔离

• 保证射频功率输出信号稳定与纯净

• 与射频控制系统及工艺控制板接口通信

• 接口类型：模块化射频接口，兼容 AMAT 控制系统

• 电气特性：

• 支持高频射频信号输入输出

• 抗干扰设计，提高信号纯净度

• 高可靠性，适应工业环境

• 机械特性：工业级模块化设计，便于安装与维护

应用场景

1. 等离子刻蚀与沉积工艺：滤波射频功率信号，保证等离子弧稳定性。

2. 射频信号隔离：防止干扰信号影响工艺均匀性和重复性。

3. 系统集成：与射频匹配导航器、射频接口模块及等离子弧电流控制板协作，形成完整射频闭环控制系统。

4. 设备维护：模块化设计便于更换和升级，提高系统可靠性。

AMAT Applied Materials 0150-30266双射频滤波器模块 英文介绍

Product Overview

AMAT Applied Materials 0150-30266 Dual RF Filter Module is an RF signal processing module used in semiconductor manufacturing equipment. Its main function is to filter and isolate RF signals, ensuring the purity of the output signal of the RF power source, while reducing the impact of interference on the process. This module typically collaborates with the RF matching navigator, RF generator interface module, and plasma arc control board to ensure stable operation of the plasma process.

Technical parameters (typical features, specific parameters need to refer to physical objects or official materials)

Product Type: Dual RF Filter Module

Main functions:

Filter and isolate RF signals

Ensure stable and pure RF power output signal

Communication with RF control system and process control board interface

Interface type: Modular RF interface, compatible with AMAT control system

Electrical characteristics:

Support high-frequency RF signal input and output

Anti interference design to improve signal purity

High reliability, adaptable to industrial environments

Mechanical characteristics: Industrial grade modular design, easy to install and maintain

Application scenarios

Plasma etching and deposition process: Filter the RF power signal to ensure the stability of the plasma arc.

RF signal isolation: prevents interference signals from affecting process uniformity and repeatability.

System integration: Collaborate with the RF matching navigator, RF interface module, and plasma arc current control board to form a complete RF closed-loop control system.

Equipment maintenance: Modular design facilitates replacement and upgrading, improving system reliability.

AMAT Applied Materials 0150-30266双射频滤波器模块 产品展示      

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AMCI 7264 encoder module
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品牌：AMAT Applied Materials

型号：0150-30266双射频滤波器模块

质保：一年

成色：全新/二手

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