AMAT Applied Materials 0190-09597涂抹器组件 PDF资料
1.产 品 资 料 介 绍:
产品概述
AMAT Applied Materials 0190-09597 涂抹器组件是一款用于半导体制造设备的精密工艺模块。它主要用于在晶圆或基板表面均匀涂布光刻胶(Photoresist)或其他工艺材料,为后续光刻、刻蚀或沉积工艺做好准备。该组件具有高精度控制和均匀涂布功能,是半导体生产流程中关键的前处理设备。
技术参数(典型特征,具体参数需参考实物或官方资料)
产品类型:涂抹器 / 涂胶组件
主要功能:
精准涂布光刻胶或工艺液体
控制旋转速度、涂布厚度和均匀性
与主机及工艺控制系统接口,实现自动化控制
接口类型:电子信号接口,兼容 AMAT 控制系统
机械特性:工业级精密机械结构,耐化学腐蚀
工艺特性:
支持多种粘度的工艺材料
可调节旋转速度和涂布时间
环境适应性:适应洁净室操作,防止颗粒污染
应用场景
半导体光刻前处理:均匀涂布光刻胶,为曝光工艺准备表面。
工艺前处理材料涂布:在晶圆或衬底上涂布保护或工艺材料。
系统自动化集成:与主机、气体面板、I/O 模块协作,实现精密自动化操作。
维护与替换:模块化设计便于清洁、维护及快速更换。
AMAT Applied Materials 0190-09597涂抹器组件 英文介绍
Product Overview
AMAT Applied Materials 0190-09597 applicator module is a precision process module used in semiconductor manufacturing equipment. It is mainly used to uniformly apply photoresist or other process materials on the surface of wafers or substrates, preparing for subsequent photolithography, etching, or deposition processes. This component has high-precision control and uniform coating functions, and is a key pre-processing equipment in the semiconductor production process.
Technical parameters (typical features, specific parameters need to refer to physical objects or official materials)
Product type: applicator/adhesive component
Main functions:
Precision coating of photoresist or process liquid
Control rotation speed, coating thickness, and uniformity
Interface with the host and process control system to achieve automated control
Interface type: electronic signal interface, compatible with AMAT control system
Mechanical characteristics: Industrial grade precision mechanical structure, resistant to chemical corrosion
Process characteristics:
Supporting process materials with multiple viscosities
Adjustable rotation speed and coating time
Environmental adaptability: Adapt to clean room operations and prevent particle contamination
Application scenarios
Pre treatment of semiconductor lithography: evenly apply photoresist to prepare the surface for exposure process.
Pre process material coating: Coating protective or process materials on wafers or substrates.
System automation integration: Collaborate with the host, gas panel, and I/O module to achieve precise automation operations.
Maintenance and replacement: Modular design facilitates cleaning, maintenance, and quick replacement.
AMAT Applied Materials 0190-09597涂抹器组件 产品展示
3.其他产品
ABB P8151B单元处理器
ABB AC900F PM904F 控制器
ICS TRIPLEX 8431处理器模块
4.其他英文产品
B&R 7AO352.70 Driver module
B&R 7DI140.70 Digital quantity input module
B&R 7DO135.70 Digital output module
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