AMAT Applied Materials 0100-90708真空控制联锁 PCB 卡 PDF资料
1.产 品 资 料 介 绍:
产品概述
AMAT Applied Materials 0100-90708 真空控制联锁 PCB 卡是一款用于半导体制造设备的安全与控制模块。它主要用于真空系统的监控和控制,确保在真空腔体压力异常或系统未达到安全状态时,自动切断相关控制信号或触发保护动作,从而保证工艺设备和操作人员的安全。该 PCB 卡通常与真空泵、传感器、主控制系统及互锁模块协作,形成完整的真空安全控制闭环。
技术参数(典型特征,具体参数需参考实物或官方资料)
产品类型:真空控制联锁 PCB 卡
主要功能:
监测真空腔体压力和状态
实现真空系统互锁与安全保护
与主机及 I/O 模块协作,实现自动化控制
接口类型:模块化电子接口,兼容 AMAT 系统背板或控制机架
电气特性:
快速响应信号变化,保证安全联锁实时性
支持低压控制信号输入与输出
抗干扰设计,适应工业环境
机械特性:工业级 PCB 尺寸,便于模块化安装与维护
安全特性:过压保护、异常状态报警及紧急切断功能
应用场景
真空腔体控制:监控设备真空状态,确保工艺条件稳定。
工艺设备安全保护:在压力异常或真空系统未准备好时触发联锁,防止设备误操作。
系统集成:与真空泵、压力传感器、互锁模块、I/O 模块及主机协作,形成完整闭环控制系统。
设备维护与升级:模块化设计便于快速更换或系统调试。
AMAT Applied Materials 0190-16177射频匹配导航器 英文介绍
Product Overview
AMAT Applied Materials 0100-90708 Vacuum Control Interlock PCB Card is a safety and control module used in semiconductor manufacturing equipment. It is mainly used for monitoring and controlling vacuum systems, ensuring that relevant control signals are automatically cut off or protective actions are triggered when the vacuum chamber pressure is abnormal or the system does not reach a safe state, thereby ensuring the safety of process equipment and operators. This PCB card typically collaborates with vacuum pumps, sensors, main control systems, and interlock modules to form a complete vacuum safety control loop.
Technical parameters (typical features, specific parameters need to refer to physical objects or official materials)
Product Type: Vacuum Control Interlock PCB Card
Main functions:
Monitor the pressure and status of the vacuum chamber
Realize interlocking and safety protection of vacuum system
Collaborate with the host and I/O modules to achieve automated control
Interface type: Modular electronic interface, compatible with AMAT system backplane or control rack
Electrical characteristics:
Quickly respond to signal changes to ensure real-time safety interlocking
Support low voltage control signal input and output
Anti interference design, suitable for industrial environments
Mechanical characteristics: Industrial grade PCB size, convenient for modular installation and maintenance
Safety features: overvoltage protection, abnormal state alarm, and emergency shutdown function
Application scenarios
Vacuum chamber control: Monitor the vacuum status of the equipment to ensure stable process conditions.
Process equipment safety protection: Trigger interlocking in case of abnormal pressure or unprepared vacuum system to prevent equipment misoperation.
System integration: Collaborate with vacuum pumps, pressure sensors, interlock modules, I/O modules, and the host to form a complete closed-loop control system.
Equipment maintenance and upgrade: Modular design facilitates quick replacement or system debugging.
AMAT Applied Materials 0190-16177射频匹配导航器 产品展示
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