AMAT Applied Materials 03-81729-00激光探测器 PDF资料 

1.产 品 资 料 介 绍：

产品概述

AMAT Applied Materials 03-81729-00 激光探测器是一种用于半导体制造设备的高精度光学传感模块。它主要用于检测工艺过程中的激光信号强度、位置或反射光，确保光学系统、曝光系统或激光测量系统的精确运行。该激光探测器通常用于光刻、激光刻蚀或表面检测等工艺环节，实现高精度控制与工艺监控。

技术参数（典型特征，具体参数需参考实物或官方资料）

• 产品类型：激光探测器 / 光学传感模块

• 检测波长：与工艺激光匹配的特定波段

• 响应时间：高速响应以适应实时监控需求

• 输出信号：模拟电压或数字信号输出

• 接口类型：模块化接口，兼容 AMAT 控制系统

• 机械特性：紧凑工业级设计，便于安装于光学或工艺模块

• 环境适应性：耐高温、抗震动，适应半导体设备工作环境

应用场景

1. 光刻设备：监控激光曝光强度及位置，确保图案转移精度。

2. 激光刻蚀/切割：实时检测激光功率与位置，实现工艺稳定控制。

3. 表面测量与检测：通过反射光检测工件表面状态，辅助工艺优化。

4. 系统集成：与 AMAT 控制模块和 PCB 信号板协作，形成完整检测与控制闭环。

AMAT Applied Materials 03-81729-00激光探测器 英文介绍

Product Overview

The AMAT Applied Materials 03-81729-00 laser detector is a high-precision optical sensing module used in semiconductor manufacturing equipment. It is mainly used to detect the intensity, position, or reflected light of laser signals during the manufacturing process, ensuring the precise operation of optical systems, exposure systems, or laser measurement systems. This laser detector is commonly used in photolithography, laser etching, or surface inspection processes to achieve high-precision control and process monitoring.

Technical parameters (typical features, specific parameters need to refer to physical objects or official materials)

Product Type: Laser Detector/Optical Sensing Module

Detection wavelength: a specific band that matches the process laser

Response time: High speed response to meet real-time monitoring requirements

Output signal: Analog voltage or digital signal output

Interface type: Modular interface, compatible with AMAT control system

Mechanical characteristics: Compact industrial grade design, easy to install in optical or process modules

Environmental adaptability: high temperature resistance, vibration resistance, and adaptability to the working environment of semiconductor equipment

Application scenarios

Lithography equipment: Monitor laser exposure intensity and position to ensure pattern transfer accuracy.

Laser etching/cutting: Real time detection of laser power and position to achieve stable process control.

Surface measurement and detection: Detecting the surface state of the workpiece through reflected light to assist in process optimization.

System integration: Collaborate with AMAT control module and PCB signal board to form a complete detection and control loop.

AMAT Applied Materials  03-81729-00激光探测器 产品展示      

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品牌：AMAT Applied Materials

型号：03-81729-00激光探测器

质保：一年

成色：全新/二手

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