AMAT Applied Materials 0100-91086等离子弧电流电路板 PDF资料 

1.产 品 资 料 介 绍：

产品概述

AMAT Applied Materials 0100-91086 等离子弧电流电路板是一款专用于半导体制造设备等离子工艺模块的核心控制板。它主要功能是监测和控制等离子弧电流，实现对等离子工艺的精确管理。通过对电流的实时采集和调节，该电路板保证刻蚀、沉积等工艺过程中的稳定性和重复性，是保证设备高精度加工的重要部件。

技术参数（典型特征，具体参数需参考实物或官方资料）

• 产品类型：等离子弧电流控制电路板

• 主要功能：

• 实时采集等离子弧电流信号

• 调节输出电流，控制等离子弧稳定性

• 与工艺控制系统协同，实现自动化调节

• 接口类型：模块化连接器，可与 AMAT 系统其他控制板或服务器配合使用

• 电气特性：

• 支持高精度电流测量

• 抗干扰能力强，适应工业环境

• 低功耗、高可靠性设计

• 机械特性：标准 PCB 模块尺寸，便于插入背板或控制机架

应用场景

1. 半导体等离子工艺控制：用于刻蚀机、PVD/CVD 等设备中的等离子弧电流调节。

2. 工艺参数稳定：确保电流稳定性，提高工艺一致性和产品良率。

3. 设备安全保护：通过实时监控电流，避免因电流异常导致的工艺或设备损伤。

4. 系统集成：与 AMAT 背板、矩阵板及控制服务器配合，实现整体自动化控制。

AMAT Applied Materials 0100-91086等离子弧电流电路板 英文介绍

Product Overview

AMAT Applied Materials 0100-91086 Plasma Arc Current Circuit Board is a core control board specifically designed for plasma process modules in semiconductor manufacturing equipment. Its main function is to monitor and control the plasma arc current, achieving precise management of the plasma process. By real-time collection and adjustment of current, this circuit board ensures stability and repeatability during processes such as etching and deposition, and is an important component for ensuring high-precision machining of equipment.

Technical parameters (typical features, specific parameters need to refer to physical objects or official materials)

Product type: Plasma arc current control circuit board

Main functions:

Real time acquisition of plasma arc current signals

Adjust the output current and control the stability of plasma arc

Collaborate with the process control system to achieve automated regulation

Interface type: Modular connector, can be used in conjunction with other control boards or servers in the AMAT system

Electrical characteristics:

Support high-precision current measurement

Strong anti-interference ability and adaptability to industrial environments

Low power consumption, high reliability design

Mechanical characteristics: Standard PCB module size for easy insertion into backplates or control racks

Application scenarios

Semiconductor plasma process control: used for regulating plasma arc current in equipment such as etching machines and PVD/CVD.

Stable process parameters: Ensure current stability, improve process consistency and product yield.

Equipment safety protection: By real-time monitoring of current, process or equipment damage caused by abnormal current can be avoided.

System integration: Collaborate with AMAT backboards, matrix boards, and control servers to achieve overall automation control.

AMAT Applied Materials 0100-91086等离子弧电流电路板 产品展示      

3.其他产品

ABB REF610C11HCNR01  继电器

ABB RDCU-12C 3AUA0000036521控制板
ABB RPBA-01 C2500843通信模块

4.其他英文产品

5SHY4045L0006 3BHB030310R0001 IGCT module
YOKOGAWA CP451-50 CPU module
DSSR122 48990001-NK Redundant module

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs

品牌：AMAT Applied Materials

型号：0100-91086等离子弧电流电路板

质保：一年

成色：全新/二手

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特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

应用行业：广泛应用于冶金、石油天然气、玻璃制造业、铝业、石油化工、煤矿、造纸印刷、纺织印染、机械、电子制造、汽车制造、烟草、塑胶机械、电力、水利、水处理/环保、市政工程、锅炉供暖、能源、输配电等

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