AMAT Applied Materials 0100-09022探测器板组件 PDF资料
1.产 品 资 料 介 绍:
AMAT Applied Materials 0100-09022 探测器板组件
一、产品概述
AMAT 0100-09022 探测器板组件(又称 Mini AI/AO Board Assembly)是应用材料(Applied Materials)半导体设备中使用的一种功能模块。它主要用于模拟输入/输出信号的采集和处理,为设备的监测、控制和信号交互提供硬件支持。该组件通常作为工艺控制系统的接口板,连接传感器、执行器以及上位控制单元。
二、技术参数(推测与常见版本参考)
功能类型:模拟输入(AI)与模拟输出(AO)
接口形式:常见为 D-Sub 接口(9 针、25 针、37 针等多规格)
安装方式:机架式或插槽式 PCB 组件
修订版本:存在 Rev F 等修订型号
工作环境:配套应用材料半导体工艺设备,满足洁净室环境标准
电气特性:
模拟输入范围:典型 0–10V 或 ±10V(视具体配置)
模拟输出范围:0–10V 或 ±10V
通道数:多通道输入/输出,支持并行信号采集
三、应用场景
半导体制造设备
等离子体刻蚀机、薄膜沉积设备(CVD/PVD)、离子注入机等。
工艺参数监控
采集腔体内传感器信号(如气压、温度、电流电压反馈)。
设备控制
输出模拟控制信号,用于驱动执行器、阀门、功率模块。
系统集成
作为主控制计算机与现场设备之间的接口板,完成数据交互。
AMAT Applied Materials 0100-09022探测器板组件 英文介绍
AMAT Applied Materials 0100-09022 Detector Board Components
1、 Product Overview
AMAT 0100-09022 Detector Board Assembly (also known as Mini AI/AO Board Assembly) is a functional module used in Applied Materials semiconductor equipment. It is mainly used for the acquisition and processing of analog input/output signals, providing hardware support for device monitoring, control, and signal interaction. This component is usually used as an interface board for process control systems, connecting sensors, actuators, and upper control units.
2、 Technical parameters (speculation and common version reference)
Function type: Analog Input (AI) and Analog Output (AO)
Interface form: Commonly used is D-Sub interface (9-pin, 25 pin, 37 pin, and other multiple specifications)
Installation method: Rack mounted or slot mounted PCB components
Revised version: There are revised models such as Rev F
Work environment: Supporting application materials, semiconductor process equipment, meeting clean room environmental standards
Electrical characteristics:
Analog input range: Typical 0-10V or ± 10V (depending on specific configuration)
Analog output range: 0-10V or ± 10V
Channel count: Multi channel input/output, supporting parallel signal acquisition
3、 Application scenarios
Semiconductor manufacturing equipment
Plasma etching machine, thin film deposition equipment (CVD/PVD), ion implantation machine, etc.
Process parameter monitoring
Collect sensor signals inside the cavity (such as air pressure, temperature, current and voltage feedback).
Device Control
Output analog control signals for driving actuators, valves, and power modules.
system integration
As the interface board between the main control computer and the on-site equipment, it completes data exchange.
AMAT Applied Materials 0100-09022探测器板组件 产品展示
3.其他产品
EMERSON IPMC761-002 输入输出模块
EMERSON 4001S2T2B4 独立输入卡
EMERSON VE4005S2B1 模拟输出模块
4.其他英文产品
PM891 3BSE053240R1 conversion module
PU519 3BSE018681R1 controller board
NI SCXI-1000 Machine box
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710-404208-00 | 531X121PCRACG1 | 073-805314-00 |
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710-400535-00 | 193X728ABG01 | F31X139APMASG2 |
710-400180-00 | 02-00315-01 | 531X309SPCAFG1 |
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