AMAT Applied Materials 0010-09195机器人组件 PDF资料
1.产 品 资 料 介 绍:
AMAT 0010-09195 机器人组件
产品概述
AMAT 0010-09195 机器人组件是 Applied Materials 半导体设备中的自动化执行模块,用于晶圆或工艺载体的搬运、定位和传输。该组件通常集成机械臂、驱动系统、传感器和控制接口,能够在控制器或 I/O 模块指令下完成高精度的自动化动作。机器人组件是实现半导体制造设备自动化、提升生产效率和保证工艺重复性的核心部件。
技术参数(推测通用特性)
类型:半导体设备自动化机器人组件
功能:晶圆/工件搬运、精确定位、工艺传输
控制接口:数字量/模拟量信号接口,连接控制器或 I/O 模块
动作精度:微米级定位精度(根据具体工艺要求)
驱动方式:电机驱动(步进或伺服),部分型号可能集成气动元件
结构特点:模块化设计,包含机械臂、传感器及控制接口
环境适应性:洁净室兼容,低颗粒排放,耐振动
应用场景
晶圆或工件自动搬运
在晶圆加工设备内完成从进料到工艺位的精确移动
工艺定位与传输
精准对准光刻、刻蚀、沉积等工艺区域
自动化生产流程
与控制器、驱动器、气缸及互锁模块协作,实现闭环自动化操作
设备安全与维护
配合互锁模块和传感器模块,确保搬运操作安全
AMAT Applied Materials 0010-09195机器人组件 英文介绍
AMAT 0010-09195 Robot Components
Product Overview
AMAT 0010-09195 robot component is an automated execution module in Applied Materials semiconductor equipment, used for the handling, positioning, and transportation of wafers or process carriers. This component typically integrates robotic arms, drive systems, sensors, and control interfaces, and is capable of performing high-precision automated actions under instructions from controllers or I/O modules. Robot components are the core components that enable automation of semiconductor manufacturing equipment, improve production efficiency, and ensure process repeatability.
Technical parameters (inferred general characteristics)
Type: Semiconductor Equipment Automation Robot Components
Function: wafer/workpiece handling, precise positioning, process transfer
Control interface: digital/analog signal interface, connected to controller or I/O module
Action accuracy: Micron level positioning accuracy (according to specific process requirements)
Drive mode: motor-driven (stepper or servo), some models may integrate pneumatic components
Structural features: Modular design, including robotic arm, sensors, and control interfaces
Environmental adaptability: cleanroom compatibility, low particle emissions, vibration resistance
Application scenarios
Automatic handling of wafers or workpieces
Accurate movement from feed to process position within wafer processing equipment
Process positioning and transmission
Accurate alignment of process areas such as photolithography, etching, and deposition
Automated production process
Collaborate with controllers, drivers, cylinders, and interlock modules to achieve closed-loop automation operations
Equipment safety and maintenance
Cooperate with interlock modules and sensor modules to ensure safe handling operations
AMAT Applied Materials 0010-09195机器人组件 产品展示
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