AMAT Applied Materials 0130-20458互锁模块 PDF资料
1.产 品 资 料 介 绍:
AMAT 0130-20458 互锁模块
产品概述
AMAT 0130-20458 互锁模块是 Applied Materials 半导体设备中的安全控制模块,用于监控和管理设备各子系统之间的安全互锁关系。它通过对开关量、传感器信号及状态反馈进行逻辑判断,实现对设备动作的安全限制和防护,防止因操作错误或设备异常导致的工艺损坏或人员伤害。该模块是半导体设备安全系统的重要组成部分。
技术参数(推测通用特性)
类型:安全互锁/逻辑控制模块
功能:监控和控制设备模块间的安全互锁
信号类型:数字量输入/输出,用于状态监控和互锁逻辑
接口形式:标准端子或插拔式接口,便于与 I/O 模块和控制器连接
电气特性:低压直流供电(如 +24VDC),具备电气隔离和过流保护
结构特点:模块化 PCB 设计,紧凑、易于安装
环境适应性:洁净室兼容,耐振动、防尘
应用场景
半导体设备安全保护
对气缸、升降机、泵板、驱动器等模块执行安全互锁
工艺操作互锁
确保在工艺步骤或设备状态不满足条件时阻止危险操作
设备维护与故障防护
避免因模块失效或误操作导致的工艺或设备损坏
与控制系统协作
向控制器或 I/O 模块提供状态信号,实现闭环安全控制
AMAT Applied Materials 0130-20458互锁模块 英文介绍
AMAT 0130-20458 Interlock Module
Product Overview
The AMAT 0130-20458 interlock module is a safety control module in Applied Materials semiconductor equipment, used to monitor and manage the safety interlock relationships between various subsystems of the equipment. It makes logical judgments on switch values, sensor signals, and status feedback to achieve safety restrictions and protection of equipment actions, preventing process damage or personnel injury caused by operational errors or equipment abnormalities. This module is an important component of the semiconductor equipment security system.
Technical parameters (inferred general characteristics)
Type: Safety interlock/logic control module
Function: Safety interlock between monitoring and control device modules
Signal type: digital input/output, used for status monitoring and interlock logic
Interface form: standard terminal or plug-in interface, easy to connect with I/O modules and controllers
Electrical characteristics: Low voltage DC power supply (such as+24VDC), with electrical isolation and overcurrent protection
Structural features: Modular PCB design, compact and easy to install
Environmental adaptability: cleanroom compatible, vibration resistant, dust-proof
Application scenarios
Semiconductor equipment security protection
Perform safety interlock on modules such as cylinders, elevators, pump plates, drivers, etc
Process operation interlock
Ensure that hazardous operations are prevented when process steps or equipment conditions are not met
Equipment maintenance and fault protection
Prevent process or equipment damage caused by module failure or misoperation
Collaborate with the control system
Provide status signals to the controller or I/O module to achieve closed-loop safety control
AMAT Applied Materials 0130-20458互锁模块 产品展示
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