AMAT Applied Materials    0150-30267双射频滤波器模块 PDF资料 

1.产 品 资 料 介 绍：

AMAT 0150-30267 双射频滤波器模块

产品概述

AMAT 0150-30267 双射频（RF）滤波器模块是 Applied Materials 半导体设备中用于射频信号处理的关键电子模块。它集成双路滤波器，用于对射频信号进行选择性滤波，抑制干扰信号、噪声或不需要的频段，从而保证射频功率源或射频系统输出信号的纯净度。该模块通常应用于等离子体发生器、刻蚀机或沉积设备的射频控制系统中，是确保工艺稳定性和精度的重要组件。

技术参数（推测通用特性）

• 类型：射频滤波器模块（双路）

• 功能：滤波、抑制干扰信号、保证射频信号质量

• 频率范围：针对特定工艺的射频频段（通常 MHz–GHz 范围）

• 接口类型：射频输入/输出接口，标准同轴或模块化接口

• 电气特性：与射频驱动器或功率源匹配阻抗（常见 50Ω）

• 结构特点：紧凑型模块设计，易于集成到射频控制系统

• 环境适应性：适应半导体洁净室环境，耐振动和温度变化

应用场景

1. 半导体设备射频系统

• 用于刻蚀、CVD/PVD 沉积设备的等离子体 RF 控制

2. 信号质量保证

• 滤除不必要频段的干扰信号，确保工艺稳定性

3. 射频功率控制

• 与射频驱动器和控制器配合，实现精确功率调节

4. 工艺优化与维护

• 模块化设计便于更换和维护，提高设备可用性

产品优势

• 射频信号纯净：有效抑制噪声和干扰，提高工艺一致性

• 双通道设计：支持同时处理两个独立射频信号，提高灵活性

• 模块化结构：便于集成、维护和快速更换

• 兼容性强：可适配多种射频功率源和半导体设备

• 适应洁净室环境：低颗粒排放、耐振动和温度变化

AMAT Applied Materials  0150-30267双射频滤波器模块 英文介绍

AMAT 0150-30267 Dual RF Filter Module

Product Overview

The AMAT 0150-30267 dual radio frequency (RF) filter module is a key electronic module used for RF signal processing in Applied Materials semiconductor equipment. It integrates dual channel filters for selective filtering of RF signals, suppressing interference signals, noise, or unwanted frequency bands, thereby ensuring the purity of RF power sources or RF system output signals. This module is commonly used in RF control systems for plasma generators, etching machines, or deposition equipment, and is an important component to ensure process stability and accuracy.

Technical parameters (inferred general characteristics)

Type: RF filter module (dual channel)

Function: Filter, suppress interference signals, ensure RF signal quality

Frequency range: RF frequency band for specific processes (usually in the MHz GHz range)

Interface type: RF input/output interface, standard coaxial or modular interface

Electrical characteristics: impedance matching with RF driver or power source (commonly 50 Ω)

Structural features: Compact module design, easy to integrate into RF control systems

Environmental adaptability: Suitable for semiconductor cleanroom environment, resistant to vibration and temperature changes

Application scenarios

Semiconductor equipment RF system

Plasma RF control for etching and CVD/PVD deposition equipment

Signal quality assurance

Filter out interference signals in unnecessary frequency bands to ensure process stability

RF power control

Cooperate with RF drivers and controllers to achieve precise power regulation

Process optimization and maintenance

Modular design facilitates replacement and maintenance, improving equipment availability

Product advantages

RF signal purity: effectively suppresses noise and interference, improves process consistency

Dual channel design: supports simultaneous processing of two independent RF signals, improving flexibility

Modular structure: easy to integrate, maintain, and quickly replace

Strong compatibility: adaptable to multiple RF power sources and semiconductor devices

Adapt to cleanroom environment: low particle emissions, vibration resistance, and temperature changes

AMAT Applied Materials   0150-30267双射频滤波器模块 产品展示      

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品牌：AMAT Applied Materials

型号： 0150-30267双射频滤波器模块

质保：一年

成色：全新/二手

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