AMAT Applied Materials 0190-02748硬度扫描仪转换模块 PDF资料
1.产 品 资 料 介 绍:
AMAT 0190-02748 硬度扫描仪转换模块
产品概述
AMAT 0190-02748 硬度扫描仪转换模块是 Applied Materials 半导体设备中用于处理和转换来自硬度扫描仪信号的电气接口模块。它负责将硬度扫描仪采集的物理参数(如表面硬度、压痕或材料响应)转换为可被控制器或 I/O 模块处理的标准电气信号,实现与设备控制系统的无缝集成。该模块是保证扫描仪数据可靠传输和工艺控制的关键部件。
技术参数(推测通用特性)
类型:信号转换/接口模块
功能:将硬度扫描仪信号转换为控制器可识别的数字或模拟信号
接口类型:标准化插头或端子接口
信号支持:模拟量输出、数字量输出或开关量信号
电气特性:低压直流供电(+24VDC 常见),具备过流保护和隔离保护
结构特点:紧凑模块化设计,适合安装在设备内部
环境适应性:洁净室兼容,耐腐蚀、低颗粒排放
应用场景
半导体工艺硬度检测
将硬度扫描仪测得的表面硬度数据传输至控制系统
数据采集与工艺反馈
与控制器和 I/O 模块协作,实现工艺监控与参数调整
设备自动化控制
支持闭环控制,实现硬度检测与后续工艺动作的联动
维护与升级
模块化设计便于快速更换或扩展设备功能
AMAT Applied Materials 0190-02748硬度扫描仪转换模块 英文介绍
AMAT 0190-02748 Hardness Scanner Conversion Module
Product Overview
The AMAT 0190-02748 Hardness Scanner Conversion Module is an electrical interface module used in Applied Materials semiconductor equipment to process and convert signals from hardness scanners. It is responsible for converting the physical parameters collected by the hardness scanner, such as surface hardness, indentation, or material response, into standard electrical signals that can be processed by the controller or I/O module, achieving seamless integration with the equipment control system. This module is a key component that ensures reliable transmission of scanner data and process control.
Technical parameters (inferred general characteristics)
Type: Signal Conversion/Interface Module
Function: Convert the hardness scanner signal into a digital or analog signal that can be recognized by the controller
Interface type: standardized plug or terminal interface
Signal support: analog output, digital output, or switch signal
Electrical characteristics: Low voltage DC power supply (+24VDC common), with overcurrent protection and isolation protection
Structural features: Compact modular design, suitable for installation inside equipment
Environmental adaptability: cleanroom compatibility, corrosion resistance, low particle emissions
Application scenarios
Semiconductor process hardness testing
Transfer the surface hardness data measured by the hardness scanner to the control system
Data collection and process feedback
Collaborate with controllers and I/O modules to achieve process monitoring and parameter adjustment
Equipment automation control
Support closed-loop control to achieve linkage between hardness testing and subsequent process actions
Maintenance and Upgrade
Modular design facilitates quick replacement or expansion of device functionality
AMAT Applied Materials 0190-02748硬度扫描仪转换模块 产品展示
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