AMAT Applied Materials  0190-08680扫描仪 PDF资料 

1.产 品 资 料 介 绍：

AMAT 0190-08680 扫描仪

产品概述

AMAT 0190-08680 扫描仪是 Applied Materials 半导体设备中用于精密位置检测和光学/激光测量的组件。它通常用于晶圆或工艺载体的定位、对准以及工艺区域扫描，通过光学或激光传感技术采集高精度位置信息，并将数据反馈给控制器或 I/O 模块，实现高精度自动化工艺操作。该模块是确保半导体设备加工精度和重复性的重要部件。

技术参数（推测通用特性）

• 类型：光学/激光扫描仪模块

• 功能：位置检测、对准、扫描测量

• 精度：微米级定位精度（根据具体工艺需求）

• 接口：数字/模拟信号输出，可连接控制器或 I/O 模块

• 控制方式：与驱动器模块及控制器联动，实现闭环控制

• 结构特点：紧凑型模块，适合洁净室环境安装

• 环境适应性：耐腐蚀、低颗粒排放，满足半导体制造洁净要求

应用场景

1. 晶圆或工艺载体定位

• 精确测量工件位置，确保光刻、刻蚀、薄膜沉积等工艺的高精度

2. 自动化工艺控制

• 提供位置反馈，配合驱动器和气缸模块，实现自动化搬运和对准

3. 工艺监控与数据采集

• 扫描测量工艺区域，采集精度数据，用于工艺优化和质量控制

4. 设备维护与校准

• 提供快速校准和故障检测功能，保证设备长期稳定运行

AMAT Applied Materials 0190-08680扫描仪 英文介绍

AMAT 0190-08680 Scanner

Product Overview

The AMAT 0190-08680 scanner is a component used in Applied Materials semiconductor equipment for precision position detection and optical/laser measurement. It is usually used for positioning, aligning, and scanning process areas of wafers or process carriers. It collects high-precision position information through optical or laser sensing technology and feeds the data back to the controller or I/O module to achieve high-precision automated process operations. This module is an important component to ensure the processing accuracy and repeatability of semiconductor equipment.

Technical parameters (inferred general characteristics)

Type: Optical/Laser Scanner Module

Function: Position detection, alignment, scanning measurement

Accuracy: Micron level positioning accuracy (according to specific process requirements)

Interface: Digital/analog signal output, can be connected to controllers or I/O modules

Control mode: linked with the driver module and controller to achieve closed-loop control

Structural features: Compact module, suitable for installation in clean room environments

Environmental adaptability: corrosion-resistant, low particle emissions, meeting the cleanliness requirements of semiconductor manufacturing

Application scenarios

Wafer or process carrier positioning

Accurately measure the position of the workpiece to ensure high precision in processes such as photolithography, etching, and thin film deposition

Automated process control

Provide position feedback, in conjunction with driver and cylinder modules, to achieve automated handling and alignment

Process monitoring and data collection

Scan and measure the process area, collect precision data for process optimization and quality control

Equipment maintenance and calibration

Provide fast calibration and fault detection functions to ensure long-term stable operation of equipment

AMAT Applied Materials  0190-09468传感器总线 产品展示      

3.其他产品

HONEYWELL XL2000B3A 控制器单元
GE IS200TRLYS1B  输出终端板
ABB 3BHE039426R0101电路板

4.其他英文产品

ICS TRIPLEX T9402 Power supply module
ICS TRIPLEX T9432 Programmable module
ICS TRIPLEX T9451 Channel module

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs

品牌：AMAT Applied Materials

型号：0190-08680扫描仪

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

                    WOODWARD、EMERSON、RELIANCE、DEIF、NI、XYVOM等

特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

应用行业：广泛应用于冶金、石油天然气、玻璃制造业、铝业、石油化工、煤矿、造纸印刷、纺织印染、机械、电子制造、汽车制造、烟草、塑胶机械、电力、水利、水处理/环保、市政工程、锅炉供暖、能源、输配电等

快递方式：国内顺丰、德邦、京东快递包邮，按照实际报价货期发货