AMAT Applied Materials 0190-27350升降机组件 PDF资料
1.产 品 资 料 介 绍:
AMAT 0190-27350 升降机组件
产品概述
AMAT 0190-27350 升降机组件是 Applied Materials 半导体设备中的关键机械部件,用于实现工艺平台、腔体或工作台的垂直移动。该组件通过电机或气动/伺服控制系统驱动升降机构,使工艺载体、晶圆或模块能够在不同工艺站或高度之间精确定位。它是设备实现自动化搬运、精密定位和工艺切换的重要单元。
技术参数(推测通用特性)
类型:机械升降组件/定位单元
驱动方式:电机驱动或气动驱动(部分型号可配伺服控制)
承载能力:可支持工艺载体或子模块重量
行程范围:根据设备工艺高度需求设计
控制接口:与控制器、I/O 模块或驱动器模块联动
结构特点:精密机械结构,具备导向、限位和安全保护功能
环境适应性:适应半导体洁净室环境,耐腐蚀、低颗粒排放
应用场景
半导体设备工艺搬运
控制晶圆或载体在工艺腔体和工位间的垂直移动
工艺平台定位
实现精确对齐,保证后续工艺步骤的准确性
自动化操作
与气缸模块、驱动器和控制器协作,实现设备自动化运行
安全互锁
升降动作受控制器与传感器监控,防止误动作和工艺损伤
AMAT Applied Materials 0190-27350升降机组件 英文介绍
AMAT 0190-27350 Elevator Components
Product Overview
AMAT 0190-27350 Lift Assembly is a critical mechanical component in Applied Materials semiconductor equipment, used to achieve vertical movement of process platforms, chambers, or workbenches. This component drives the lifting mechanism through a motor or pneumatic/servo control system, enabling precise positioning of process carriers, wafers, or modules between different process stations or heights. It is an important unit for equipment to achieve automated handling, precise positioning, and process switching.
Technical parameters (inferred general characteristics)
Type: Mechanical lifting component/positioning unit
Drive mode: motor drive or pneumatic drive (some models can be equipped with servo control)
Carrying capacity: capable of supporting the weight of process carriers or submodules
Travel range: designed according to the height requirements of the equipment process
Control interface: linked with controller, I/O module or driver module
Structural features: Precision mechanical structure with guiding, limiting, and safety protection functions
Environmental adaptability: Suitable for semiconductor cleanroom environment, corrosion-resistant, low particle emissions
Application scenarios
Semiconductor equipment process handling
Control the vertical movement of wafers or carriers between process chambers and workstations
Process platform positioning
Realize precise alignment to ensure the accuracy of subsequent process steps
automated operation
Collaborate with cylinder modules, drivers, and controllers to achieve automated operation of equipment
Security interlock
The lifting action is monitored by the controller and sensors to prevent misoperation and process damage
AMAT Applied Materials 0190-27350升降机组件产品展示
3.其他产品
Emerson KJ3102X1-BA1 控制器模块
BENTLY 330180-51-05 传感器
HONEYWELL XL2000B3A 控制器单元
4.其他英文产品
TRICONEX EPI3382 Control card
ICS TRIPLEX 9100 base
ICS TRIPLEX 9802*3 base
6ES58640MA040UG4 | CACR-SR15BE12FY8 | 46088203 |
6ES58487DA040UG4 | CACR-UP50AABY45 | 067-10100-0006 |
6ES58427CB010KL1 | CACR-PR03BC3CSY30 | 851-8833-001A |
6ES5835-8MD01 | CACR-IR30SFD | SBC486DX66 |
6ES5835-6SC11 | CACR-120-PD1VDS01 | 68-0056-11 |
6ES5816-1AA21 | CACR-HR20UB | EPC-5P |
6ES5788-8MA11 | CACRSR20SB1BFY118 | 456162-004 |
6ES5782-2MB11 | CACR-SR20SF1BFB | RADI-EPC7 |
本篇文章出自瑞昌明盛自动化设备有限公司官网,转载请附上此链接:http://www.jiangxidcs