AMAT Applied Materials 3020-01085气缸空气模块 PDF资料 

1.产 品 资 料 介 绍：

AMAT 3020-01085 气缸空气模块

产品概述

AMAT 3020-01085 气缸空气模块是 Applied Materials 半导体设备中的气动执行单元，用于控制气缸的伸缩动作，从而实现工艺机械部件的移动、定位或夹持。该模块通常集成气路接口、控制阀及传感器接口，可与控制器、驱动器或 I/O 模块联动，实现精确的气动操作。它是设备中实现自动化机械动作的重要部件。

技术参数（推测通用特性）

• 类型：气缸控制模块/气动执行模块

• 功能：气缸伸缩控制、气路分配、状态反馈

• 气源要求：工业压缩空气（常见 0.5–0.7 MPa）

• 接口：电气控制信号接口（数字量/模拟量） + 气管接口

• 工作温度：适应半导体设备洁净室环境

• 附加功能：部分型号带行程传感器或压力监测接口

应用场景

1. 半导体设备机械动作

• 控制腔体门、夹具或工艺台的气缸动作

2. 气动夹持与定位

• 在处理晶圆或工艺部件时实现自动化夹持、释放和定位

3. 设备自动化控制

• 与控制器模块、I/O 卡和驱动器协作，实现闭环气动控制

4. 安全互锁与工艺顺序控制

• 确保在安全状态下执行气缸动作，避免设备或工艺损伤

产品优势

• 动作精确：保证气缸伸缩位置和速度符合工艺要求

• 响应迅速：满足半导体设备对高速自动化操作的需求

• 模块化设计：便于拆装、维护和更换

• 安全可靠：支持状态反馈和互锁功能，降低设备故障风险

• 适应洁净室环境：耐腐蚀、低颗粒排放，符合半导体制造标准

AMAT Applied Materials 3020-01085气缸空气模块 英文介绍

AMAT 3020-01085 Cylinder Air Module

Product Overview

AMAT 3020-01085 cylinder air module is a pneumatic execution unit in Applied Materials semiconductor equipment, used to control the expansion and contraction of cylinders, thereby achieving the movement, positioning, or clamping of process mechanical components. This module typically integrates pneumatic interfaces, control valves, and sensor interfaces, and can be linked with controllers, drivers, or I/O modules to achieve precise pneumatic operations. It is an important component for achieving automated mechanical actions in equipment.

Technical parameters (inferred general characteristics)

Type: Cylinder Control Module/Pneumatic Execution Module

Function: Cylinder telescopic control, air path distribution, status feedback

Gas source requirement: Industrial compressed air (commonly 0.5-0.7 MPa)

Interface: Electrical control signal interface (digital/analog)+tracheal interface

Working temperature: Suitable for semiconductor equipment cleanroom environment

Additional features: Some models come with travel sensors or pressure monitoring interfaces

Application scenarios

Mechanical action of semiconductor equipment

Control the cylinder action of the chamber door, fixture or process table

Pneumatic clamping and positioning

Realize automated clamping, release, and positioning when processing wafers or process components

Equipment automation control

Collaborate with controller modules, I/O cards, and drivers to achieve closed-loop pneumatic control

Safety interlock and process sequence control

Ensure that cylinder actions are performed in a safe state to avoid equipment or process damage

Product advantages

Accurate action: Ensure that the cylinder's telescopic position and speed meet the process requirements

Quick response: meeting the demand of semiconductor equipment for high-speed automation operation

Modular design: easy to disassemble, maintain, and replace

Safe and reliable: Supports status feedback and interlock functions to reduce the risk of equipment failure

Adapt to cleanroom environment: corrosion-resistant, low particle emissions, in compliance with semiconductor manufacturing standards

AMAT Applied Materials 3020-01085气缸空气模块 产品展示      

3.其他产品

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ABB UFC760BE143 3BHE004573R0143 控制板模块
YASKAWA CP-9200SH/CPU 逻辑控制器

4.其他英文产品

PU519 3BSE018681R1 controller board
NI SCXI-1000 Machine box
RELIANCE WR-D4007 Semiconductor module

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs

品牌：AMAT Applied Materials

型号：3020-01085气缸空气模块

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

                    WOODWARD、EMERSON、RELIANCE、DEIF、NI、XYVOM等

特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

应用行业：广泛应用于冶金、石油天然气、玻璃制造业、铝业、石油化工、煤矿、造纸印刷、纺织印染、机械、电子制造、汽车制造、烟草、塑胶机械、电力、水利、水处理/环保、市政工程、锅炉供暖、能源、输配电等

快递方式：国内顺丰、德邦、京东快递包邮，按照实际报价货期发货