AMAT Applied Materials 0100-91085导管PCB PDF资料
1.产 品 资 料 介 绍:
AMAT 0100-91085 导管 PCB
产品概述
AMAT 0100-91085 导管 PCB 是 Applied Materials 半导体设备中的关键接口电路板,用于工艺气体导管与控制系统之间的电气信号传递。它通过集成传感器接口、电气隔离和信号分配功能,实现对气体流量、压力或开关状态的监测与控制。该模块通常安装在气体面板或工艺腔体附近,是设备气路与电子控制系统之间的重要桥梁。
技术参数(推测通用特性)
功能类型:信号采集与传递、导管接口 PCB
输入/输出信号:数字量与模拟量接口,可连接气体流量计、压力传感器、阀门状态开关
电气特性:低压直流供电(+24VDC),具备过流、过压及电气隔离保护
结构特点:紧凑型 PCB,支持模块化安装,耐半导体洁净室环境
接口适配:可与控制器模块、驱动器模块及继电器模块协作
应用场景
工艺气体面板系统
监测气体流量、压力及阀门状态,确保工艺参数准确
半导体制程设备
在 CVD、PVD、刻蚀、清洗等设备中实现气体信号与控制逻辑的接口
安全互锁与报警系统
通过信号采集,实现气体泄漏检测、互锁控制或报警触发
设备维护与调试
模块化设计便于快速更换与测试,提高设备可用性
AMAT Applied Materials 0100-91085导管PCB Product Overview
AMAT 0100-91085 Conduit PCB
Product Overview
AMAT 0100-91085 Conduit PCB is a critical interface circuit board in Applied Materials semiconductor equipment, used for electrical signal transmission between process gas conduits and control systems. It achieves monitoring and control of gas flow, pressure, or switch status by integrating sensor interfaces, electrical isolation, and signal distribution functions. This module is usually installed near the gas panel or process chamber, and is an important bridge between the equipment gas circuit and the electronic control system.
Technical parameters (inferred general characteristics)
Function type: signal acquisition and transmission, conduit interface PCB
Input/output signals: digital and analog interfaces, can be connected to gas flow meters, pressure sensors, valve status switches
Electrical characteristics: Low voltage DC power supply (+24VDC), with overcurrent, overvoltage, and electrical isolation protection
Structural features: Compact PCB, supporting modular installation, resistant to semiconductor cleanroom environment
Interface adaptation: Can collaborate with controller modules, driver modules, and relay modules
Application scenarios
Process gas panel system
Monitor gas flow rate, pressure, and valve status to ensure accurate process parameters
Semiconductor process equipment
Implement gas signal and control logic interface in CVD, PVD, etching, cleaning and other equipment
Security interlock and alarm system
By collecting signals, gas leakage detection, interlock control, or alarm triggering can be achieved
Equipment maintenance and debugging
Modular design facilitates quick replacement and testing, improving equipment availability
AMAT Applied Materials 0100-91085导管PCB 产品展示
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