AMAT Applied Materials 0242-88626套件泵板 PDF资料
1.产 品 资 料 介 绍：
AMAT 0242-88626 套件泵板
产品概述
AMAT 0242-88626 套件泵板是一种专为半导体设备设计的模块化板件，用于泵系统的集成与控制。它可整合泵的电源、控制信号及接口，实现泵的稳定驱动和工艺流体的精确管理。该模块通常安装在设备的泵站或气体/液体处理子系统中，是实现泵系统可靠运行和流程控制的重要组件。
技术参数（推测通用特性）
类型：泵系统控制/接口模块
功能：泵驱动、泵状态监控、接口信号分配
接口形式：电气控制接口 + 流体连接端口
电气特性：低压直流供电（常见 +24VDC）、带过流、过压保护
Product Overview
AMAT Applied Materials 0021-07089 clamp cover component is a mechanical fixing component applied to semiconductor equipment, mainly used for sealing and structural fixation of process chambers, gas path systems or related submodules. It ensures the sealing and stability of the equipment in vacuum, gas, or high-precision environments by clamping the cavity cover plate, pipeline interface, or protective cover firmly together. This component belongs to vulnerable and maintenance parts, making it easy to disassemble and replace quickly.
Technical Specifications
Type: Mechanical clamp cover/fastening component
Main materials: stainless steel or high-strength alloy (suitable for vacuum and clean room environments)
Surface treatment: anti-corrosion, anti particle treatment
Installation method: buckle/bolt locking form
Durability: Can withstand long-term high-frequency opening and closing and use in vacuum environments
Application scenarios
Semiconductor process chamber
Used for clamping and sealing the cavity cover plate to ensure the airtightness of the process
Gas and Vacuum Systems
Fixed valve cover plate, air circuit joint or vacuum chamber component
Equipment maintenance
Easy to disassemble and assemble quickly during daily maintenance and replacement of parts
Mechanical protection
Used as a protective cover clamping device for control modules or sensitive areas
Product advantages
High reliability sealing: ensuring the safety of process chambers and gas channels
Strong corrosion resistance: suitable for semiconductor clean rooms and corrosive gas environments
Modular design: facilitates equipment maintenance and reduces downtime
High mechanical strength: ensuring stable fixation effect under long-term operation
Good universality: can be widely used in the process chambers and subsystems of multiple models of Applied Materials equipment
AMAT Applied Materials 0242-88626套件泵板产品展示
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| 710-610801-001 | 531X111PSHAPG3 | F31X111PSHARG1 |
| 710-610522-000 | 193X741ACG01 | 710-661726-00 |
| 710-609995-003 | 193X801DAG01 | 710-611487-001 |
| 710-608020-01 | 193X740ACG01 | 531X309PCAJG1 |
| 710-606238-005 | 193X803BCG03 | 073-614993-000 |
| 710-606238-00 | 6DD1684-0FB0 | 500-22333-001 |
| 710-566009-00 | 6DD1684-0EF0 | 710-660800-00 |
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