AMAT Applied Materials 0021-07089夹盖组件 PDF资料 

1.产 品 资 料 介 绍：

产品概述

AMAT Applied Materials 0021-07089 夹盖组件是一种应用于半导体设备的机械固定部件，主要用于工艺腔体、气路系统或相关子模块的密封和结构固定。它通过夹紧方式确保腔体盖板、管路接口或保护盖牢固结合，从而保证设备在真空、气体或高精度环境下的密封性与稳定性。该组件属于易损件和维护件，便于快速拆装和更换。

技术参数

• 类型：机械夹盖/紧固组件

• 主要材料：不锈钢或高强度合金（适应真空和洁净室环境）

• 表面处理：防腐蚀、防颗粒处理

• 安装方式：卡扣/螺栓锁紧形式

• 耐用性：可承受长时间高频率开合及真空环境使用

应用场景

1. 半导体工艺腔体

• 用于腔体盖板的夹持与密封，确保工艺过程的气密性

2. 气体与真空系统

• 固定阀门盖板、气路接头或真空室部件

3. 设备维护

• 在日常维护和更换零件时，便于快速拆装

4. 机械保护

• 用作控制模块或敏感区域的保护盖夹持装置

产品优势

• 高可靠密封性：保障工艺腔体和气体通道的安全性

• 耐腐蚀性强：适应半导体洁净室及腐蚀性气体环境

• 模块化设计：方便设备维护，减少停机时间

• 机械强度高：保证长期运行下的稳定固定效果

• 通用性好：可广泛用于 Applied Materials 多型号设备的工艺腔体与子系统

AMAT Applied Materials 0021-07089夹盖组件 英文资料：

Product Overview

AMAT Applied Materials 0021-07089 clamp cover component is a mechanical fixing component applied to semiconductor equipment, mainly used for sealing and structural fixation of process chambers, gas path systems or related submodules. It ensures the sealing and stability of the equipment in vacuum, gas, or high-precision environments by clamping the cavity cover plate, pipeline interface, or protective cover firmly together. This component belongs to vulnerable and maintenance parts, making it easy to disassemble and replace quickly.

Technical Specifications

Type: Mechanical clamp cover/fastening component

Main materials: stainless steel or high-strength alloy (suitable for vacuum and clean room environments)

Surface treatment: anti-corrosion, anti particle treatment

Installation method: buckle/bolt locking form

Durability: Can withstand long-term high-frequency opening and closing and use in vacuum environments

Application scenarios

Semiconductor process chamber

Used for clamping and sealing the cavity cover plate to ensure the airtightness of the process

Gas and Vacuum Systems

Fixed valve cover plate, air circuit joint or vacuum chamber component

Equipment maintenance

Easy to disassemble and assemble quickly during daily maintenance and replacement of parts

Mechanical protection

Used as a protective cover clamping device for control modules or sensitive areas

Product advantages

High reliability sealing: ensuring the safety of process chambers and gas channels

Strong corrosion resistance: suitable for semiconductor clean rooms and corrosive gas environments

Modular design: facilitates equipment maintenance and reduces downtime

High mechanical strength: ensuring stable fixation effect under long-term operation

Good universality: can be widely used in the process chambers and subsystems of multiple models of Applied Materials equipment

AMAT Applied Materials 0021-07089夹盖组件 产品展示      

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TRICONEX 2301 控制器模块

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KVC758A124 3BHE021951R1024 IGCT high voltage module
PFEA112-20 3BSE030369R0020 Tension controller
FCP280 RH924YA control module

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品牌：AMAT Applied Materials

型号：0021-07089夹盖组件

质保：一年

成色：全新/二手

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