AMAT Applied Materials 0130-11002数字输入输出卡 PDF资料
1.产 品 资 料 介 绍：
AMAT 0130-11002 数字输入输出卡
产品概述
AMAT 0130-11002 数字输入输出卡是 Applied Materials 半导体设备中的一类 I/O 接口模块，用于实现设备与外部传感器、执行器之间的数字信号交互。它作为控制系统与现场信号的桥梁，能够采集数字输入信号（如开关量、状态信号），并输出数字控制信号（如继电器控制、动作触发），从而完成设备逻辑控制与互锁保护。
技术参数（推测通用特性）
输入通道：多路数字量输入，支持干接点或有源信号
输出通道：多路数字量输出，可驱动继电器、指示灯、电磁阀等
电气特性：常用 24VDC 工业控制电平，具备过流、过压与隔离保护
信号隔离：采用光耦或继电器隔离，防止干扰影响核心控制单元
通信接口：通过背板总线或标准接口与控制器模块连接
可靠性：满足半导体生产环境长时间运行的高稳定性要求
应用场景
半导体设备信号采集与控制
采集腔体门锁、真空开关、温控器、气体阀门等状态信号
输出控制信号驱动真空阀、电磁执行器、报警装置
安全互锁系统
与继电器模块、控制器模块协作，实现设备的多级互锁控制
防止在不安全条件下启动关键子系统
工艺自动化逻辑
支持工艺步骤的顺序控制（如先抽真空再通气体）
触发动作信号，确保工艺流程符合预设逻辑
设备诊断与维护
提供输入/输出状态反馈，便于工程师进行设备故障定位
在设备升级或扩展时，可增加 I/O 通道以提升控制能力
AMAT Applied Materials 0130-11002数字输入输出卡 英文资料：
AMAT 0130-11002 Digital Input/Output Card
Product Overview
AMAT 0130-11002 Digital Input/Output Card is a type of I/O interface module in Applied Materials semiconductor equipment, used to achieve digital signal interaction between the device and external sensors and actuators. As a bridge between the control system and on-site signals, it can collect digital input signals (such as switch values and status signals) and output digital control signals (such as relay control and action triggering), thereby completing equipment logic control and interlock protection.
Technical parameters (inferred general characteristics)
Input channel: Multiple digital inputs, supporting dry contacts or active signals
Output channel: Multi channel digital output, capable of driving relays, indicator lights, solenoid valves, etc
Electrical characteristics: commonly used 24VDC industrial control level, with overcurrent, overvoltage and isolation protection
Signal isolation: using optocouplers or relays for isolation to prevent interference from affecting the core control unit
Communication interface: connected to the controller module through a backplane bus or standard interface
Reliability: Meet the high stability requirements for long-term operation in semiconductor production environments
Application scenarios
Signal acquisition and control of semiconductor equipment
Collect status signals of chamber door locks, vacuum switches, temperature controllers, gas valves, etc
Output control signals to drive vacuum valves, electromagnetic actuators, and alarm devices
Security interlock system
Collaborate with relay modules and controller modules to achieve multi-level interlocking control of equipment
Prevent the startup of critical subsystems under unsafe conditions
Process automation logic
Support sequential control of process steps (such as vacuuming before gas flow)
Trigger the action signal to ensure that the process flow conforms to the preset logic
Equipment diagnosis and maintenance
Provide input/output status feedback for engineers to locate equipment faults
When upgrading or expanding devices, I/O channels can be added to enhance control capabilities
AMAT Applied Materials 0130-11002数字输入输出卡 产品展示
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4.其他英文产品
HONEYWELL CC-PAOX01 Control module
PCH1026 Channel touch point card
PM825 3BSE010796R1 Sequence controller
| 710-657068-20 | 8005-CP-50 | 710-659603-20 |
| 710-657058-20 | 8005-CP-51 | 073-653015-00 |
| 710-655651-20 | 8005-CB-60 | 710-650099-20 |
| 710-653699-20 | 8005-AN-108 | 710-809156-000 |
| 710-652697-20 | 8055-SCP-655X | 710-678525-00 |
| 710-652010-20 | 8055-SCP-655R | 531X310SNDAEG1 |
| 710-651090-20 | 8055-SCP-655 | 820-06553-000 |
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