AMAT Applied Materials 0190-76273驱动器 PDF资料
1.产 品 资 料 介 绍:
AMAT 0190-76273 驱动器
产品概述
AMAT 0190-76273 驱动器是 Applied Materials 半导体设备中的核心执行控制单元,主要用于精确驱动机械或电气执行部件,例如阀门、马达、定位装置等。它通过接收控制器模块的指令,将低功率的逻辑信号转换为高功率的执行信号,从而实现设备子系统的动作控制。该模块广泛应用于真空腔体控制、气体面板调节以及工艺执行机构的运动控制。
技术参数(推测通用特性)
驱动对象:电机、步进电机、伺服执行机构、阀门、电磁装置等
输入接口:接受来自控制器模块的数字/模拟控制信号或通信指令
输出特性:提供高电流驱动能力,具备过流、过压、短路保护
电源要求:通常为低压直流(+24VDC 或更高功率等级的 DC 电源),满足高功率执行需求
功能扩展:部分版本可能带有位置反馈或闭环控制接口
应用场景
半导体工艺执行机构
驱动 CVD、PVD、刻蚀、清洗设备中的腔体机械结构
控制工艺阀门、升降机构、旋转台、定位器等
真空与气体系统
控制真空阀门、压力调节单元
驱动气体面板上的电磁阀,实现气体流量和切换的精确控制
温控与功率单元
驱动冷却液系统的泵或风机
协助电源模块执行高精度调节
设备安全与动作联锁
结合继电器模块、控制器模块实现安全动作顺序控制
确保工艺执行过程符合安全标准
AMAT Applied Materials 0190-76273驱动器 英文资料:
AMAT 0190-76273 Driver
Product Overview
The AMAT 0190-76273 driver is the core execution control unit in Applied Materials semiconductor equipment, mainly used for precise driving of mechanical or electrical execution components such as valves, motors, positioning devices, etc. It converts low-power logic signals into high-power execution signals by receiving instructions from the controller module, thereby achieving action control of the device subsystem. This module is widely used in vacuum chamber control, gas panel adjustment, and motion control of process execution mechanisms.
Technical parameters (inferred general characteristics)
Drive objects: motors, stepper motors, servo actuators, valves, electromagnetic devices, etc
Input interface: accepts digital/analog control signals or communication instructions from the controller module
Output characteristics: Provides high current driving capability, with overcurrent, overvoltage, and short-circuit protection
Power requirements: Typically low voltage DC (+24VDC or higher power level DC power supply) to meet high-power execution needs
Function extension: Some versions may have position feedback or closed-loop control interfaces
Application scenarios
Semiconductor process execution mechanism
Drive the mechanical structure of cavities in CVD, PVD, etching, and cleaning equipment
Control process valves, lifting mechanisms, rotary tables, locators, etc
Vacuum and Gas Systems
Control vacuum valve and pressure regulating unit
Drive the solenoid valve on the gas panel to achieve precise control of gas flow and switching
Temperature control and power unit
Pump or fan that drives the coolant system
Assist the power module in performing high-precision adjustment
Equipment safety and action interlocking
Combining relay module and controller module to achieve safety action sequence control
Ensure that the process execution meets safety standards
AMAT Applied Materials 0190-76273驱动器 产品展示
3.其他产品
ABB 07AI90-S GJR5251200R0202 分析输入单元
SCHNEIDER ATV71HD22N4 变速驱动模块
ABB CS3107KT93控制器模块
4.其他英文产品
AUTOMATIONX AXLINK100 892.202988 module
HONEYWELL CC-PAIX01 Sequence control module
HONEYWELL CC-PAOX01 Control module
710-658956-00 | 8005-PR-4 | 4136J57-G01 |
710-658909-001 | 8005-NLU-10 | 4136J56-G01 |
710-658669-00 | 8005-MP-24 | 4136J54G4 |
710-658363-20 | 8005-LTV-101 | 4136J56-G1 |
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710-658232-20 | 8005-LNV-101 | 8030-DIM-101 |
710-658232-00 | 8005-EPS-51 | 8030-CRM-931 |
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