AMAT Applied Materials 0100-99007控制器模块 PDF资料 

1.产 品 资 料 介 绍：

AMAT 0100-99007 控制器模块

产品概述

AMAT 0100-99007 控制器模块是 Applied Materials 半导体工艺设备中的关键控制单元。该模块通过高精度的硬件与嵌入式控制逻辑，对工艺气体、真空系统、电源单元以及执行机构进行集中管理与调度。它通常安装于设备的主控子系统内，作为设备运行的“大脑”，为工艺过程提供可靠的控制与实时响应。

技术参数（推测通用特性）

• 控制功能：支持多路信号输入与输出，具备数据采集、逻辑判断、实时控制能力

• 接口形式：模拟量、数字量以及总线通信接口（用于与MFC、真空泵、电源等模块交互）

• 处理性能：内置嵌入式处理器或FPGA电路，保证毫秒级响应时间

• 电气特性：工作电压通常为低压直流（+24VDC），具备过压、过流与短路保护

• 环境要求：满足半导体洁净室使用条件，具备抗电磁干扰与长期运行稳定性

应用场景

1. 半导体工艺设备核心控制

• 用于刻蚀（Etch）、沉积（CVD、PVD、ALD）、清洗、离子注入等设备

• 实现气体供应、真空度控制、射频电源启停、温度调节等核心环节的协调管理

2. 设备安全与互锁控制

• 与门锁、真空腔体、气体面板等互锁模块协同工作

• 防止在非安全条件下执行危险操作，保障设备与人员安全

3. 工艺精度控制

• 对工艺气体流量、压力、温度等关键参数进行实时监控与调节

• 提升工艺重复性与良率

4. 数据采集与诊断

• 采集运行数据并传输至上位机或设备主控系统

• 作为故障诊断与预防性维护的重要信息来源

AMAT Applied Materials 0100-99007控制器模块 英文资料：

AMAT 0100-99007 Controller Module

Product Overview

The AMAT 0100-99007 controller module is a critical control unit in Applied Materials semiconductor process equipment. This module centrally manages and schedules process gases, vacuum systems, power units, and actuators through high-precision hardware and embedded control logic. It is usually installed in the main control subsystem of the equipment, serving as the "brain" of the equipment operation, providing reliable control and real-time response for the process.

Technical parameters (inferred general characteristics)

Control function: Supports multiple signal inputs and outputs, with data acquisition, logical judgment, and real-time control capabilities

Interface format: analog, digital, and bus communication interface (used for interaction with modules such as MFC, vacuum pump, power supply, etc.)

Processing performance: Built in embedded processor or FPGA circuit, ensuring millisecond level response time

Electrical characteristics: The working voltage is usually low voltage direct current (+24VDC), with overvoltage, overcurrent, and short-circuit protection

Environmental requirements: Meet the conditions for use in semiconductor cleanrooms, with resistance to electromagnetic interference and long-term operational stability

Application scenarios

Core control of semiconductor process equipment

Used for etching (Etch), deposition (CVD, PVD, ALD), cleaning, ion implantation and other equipment

Coordinate and manage core processes such as gas supply, vacuum control, RF power on/off, temperature regulation, etc

Equipment safety and interlock control

Collaborate with interlocking modules such as door locks, vacuum chambers, gas panels, etc

Prevent dangerous operations from being carried out under unsafe conditions and ensure the safety of equipment and personnel

Process precision control

Real time monitoring and adjustment of key parameters such as process gas flow rate, pressure, temperature, etc

Improve process repeatability and yield

Data Collection and Diagnosis

Collect operational data and transmit it to the upper computer or equipment control system

As an important source of information for fault diagnosis and preventive maintenance

AMAT Applied Materials 0100-99007控制器模块 产品展示      

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本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs

品牌：AMAT Applied Materials

型号：0100-99007控制器模块

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

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特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

应用行业：广泛应用于冶金、石油天然气、玻璃制造业、铝业、石油化工、煤矿、造纸印刷、纺织印染、机械、电子制造、汽车制造、烟草、塑胶机械、电力、水利、水处理/环保、市政工程、锅炉供暖、能源、输配电等

快递方式：国内顺丰、德邦、京东快递包邮，按照实际报价货期发货