AMAT Applied Materials 0100-09307继电器模块 PDF资料
1.产 品 资 料 介 绍：
AMAT 0100-09307 继电器模块
产品概述
AMAT 0100-09307 是 Applied Materials 半导体设备中的一块 继电器/互锁电路板模块，主要用于安全控制与电路切换。它通过集成继电器与互锁逻辑电路，实现对设备子系统的电气控制与保护。
技术特性（推测通用特征）
功能类型：继电器驱动 + 互锁逻辑
应用对象：电源、真空泵、气体阀门、风机、电磁执行器等子系统
控制形式：支持常开/常闭触点切换
安全属性：具备互锁功能，防止在不安全条件下误动作
电气性能：设计满足半导体设备的高可靠性、长寿命和低干扰需求
应用场景
半导体制造设备
用于刻蚀机、CVD、PVD、清洗机等工艺设备的电气控制回路
保障工艺气体、真空、射频电源等子系统的安全切换
互锁与安全保护
实现设备门锁、腔体盖板、气体面板等的互锁逻辑
在异常或危险条件下自动切断电源，保护人员与设备安全
电源与执行器控制
控制真空泵、冷却系统、气体阀门、风机等外围装置的启停
作为逻辑允许信号模块，保证动作顺序正确
设备诊断与维护
通过继电器状态反馈，辅助工程师诊断电路健康状态
在预防性维护中，作为可替换单元，快速恢复设备运行
产品优势
高可靠性：满足半导体生产线长周期连续运行要求
安全联锁：避免工艺异常条件下设备误动作
模块化设计：易于更换与维护，缩短停机时间
电气隔离：通过继电器隔离控制与执行回路，提升系统稳定性
AMAT Applied Materials 0100-09307继电器模块 英文资料：
AMAT 0100-09307 Relay Module
Product Overview
AMAT 0100-09307 is a relay/interlock circuit board module in Applied Materials semiconductor equipment, mainly used for safety control and circuit switching. It achieves electrical control and protection of equipment subsystems by integrating relays and interlock logic circuits.
Technical characteristics (inferred general features)
Function type: Relay driven+Interlock logic
Application objects: power supply, vacuum pump, gas valve, fan, electromagnetic actuator and other subsystems
Control form: Supports switching between normally open/normally closed contacts
Security attribute: equipped with interlocking function to prevent accidental operation under unsafe conditions
Electrical performance: Designed to meet the high reliability, long lifespan, and low interference requirements of semiconductor equipment
Application scenarios
Semiconductor manufacturing equipment
Used for etching machines CVD、PVD、 Electrical control circuits for process equipment such as cleaning machines
Ensure safe switching of subsystems such as process gas, vacuum, and RF power supply
Interlocking and Security Protection
Implement interlocking logic for equipment door locks, chamber covers, gas panels, etc
Automatically cut off power in abnormal or dangerous conditions to protect personnel and equipment safety
Power supply and actuator control
Control the start and stop of peripheral devices such as vacuum pumps, cooling systems, gas valves, fans, etc
As a logical permission signal module, ensure the correct sequence of actions
Equipment diagnosis and maintenance
Assist engineers in diagnosing the health status of circuits through relay status feedback
In preventive maintenance, as a replaceable unit, quickly restore equipment operation
Product advantages
High reliability: meets the long-term continuous operation requirements of semiconductor production lines
Safety interlock: prevent equipment misoperation under abnormal process conditions
Modular design: easy to replace and maintain, reducing downtime
Electrical isolation: By isolating control and execution circuits through relays, system stability is improved
AMAT Applied Materials 0100-09307继电器模块 产品展示
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| 735-5-5-LO-485 | 8030-RIM-25 | X-FTA 002 02L 02R |
| 735-5-5-HI-485 | 8030-RIM-144 | X-FTA 002 01L 01R |
| 735-5-5-125-485-DEMO | 8030-RIM-143 | X-FTA 001 02L |
| 735-5-1-LO-485 | 8030-RIM-141 | X-FTA 001 01L |
| 735-5-1-HI-485 | 8030-ROM-141 | X-MIO 7/6 01 |
| 720-23743-000 | 8030-ROM-131 | X-HART 32 01 |
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