AMAT Applied Materials 0100-09110过滤板 PDF资料
1.产 品 资 料 介 绍：
产品概述
AMAT 0100-09110 是 Applied Materials 半导体设备中的 过滤板（Filter Plate）。
该组件主要用于 过滤设备内的气体或液体颗粒杂质，保护工艺环境和关键部件，确保半导体制造过程中洁净度要求得到满足。过滤板是气体供应系统、真空腔体或液体循环系统中的关键部件。
技术参数（推断性质）
类型：过滤板（Filter Plate）。
功能：
去除气体或液体流动中的微粒、杂质和污染物。
提供稳定流动通道，保证设备工艺过程的气流或液流稳定。
材质：耐腐蚀、高洁净度材料（如不锈钢、聚四氟乙烯或滤材复合结构）。
适用环境：半导体洁净室和高纯度工艺环境。
安装位置：气体供应管路、真空腔体或液体循环系统的滤芯槽位。
特点：高过滤精度、低压降、易于拆装和更换，保证长期稳定运行。
应用场景
工艺气体过滤
去除沉积、刻蚀或清洗工艺中气体中的微粒，防止污染晶圆。
液体循环系统过滤
在液体化学品供应系统中去除杂质，保证工艺稳定性和产品质量。
设备保护
过滤板保护下游传感器、阀门、泵和控制模块免受颗粒损伤。
维护与更换
模块化设计便于快速拆装，支持定期更换以维持过滤效果。
产品优势
高过滤精度：保证气体或液体流体纯净，保护工艺质量。
低压降：减少流体阻力，保证系统稳定流动。
耐腐蚀、耐洁净：适应半导体洁净室环境和化学介质。
模块化维护方便：便于拆装和更换，降低停机时间。
兼容性好：专为 AMAT 系列设备设计，适配气体或液体供应系统。
AMAT Applied Materials 0100-09110过滤板 英文资料：
Product Overview
AMAT 0100-09110 is a filter plate used in Applied Materials semiconductor equipment.
This component is mainly used to filter gas or liquid particle impurities inside the equipment, protect the process environment and critical components, and ensure that the cleanliness requirements are met in the semiconductor manufacturing process. The filter plate is a critical component in gas supply systems, vacuum chambers, or liquid circulation systems.
Technical parameters (inferred properties)
Type: Filter Plate.
Function:
Remove particles, impurities, and pollutants from gas or liquid flow.
Provide stable flow channels to ensure stable airflow or liquid flow during the equipment process.
Material: Corrosion resistant, high cleanliness material (such as stainless steel, polytetrafluoroethylene, or filter material composite structure).
Applicable environment: semiconductor clean room and high-purity process environment.
Installation location: filter slot of gas supply pipeline, vacuum chamber or liquid circulation system.
Features: High filtration accuracy, low pressure drop, easy disassembly and replacement, ensuring long-term stable operation.
Application scenarios
Process gas filtration
Remove particles from gases during deposition, etching, or cleaning processes to prevent wafer contamination.
Liquid circulation system filtration
Remove impurities in the liquid chemical supply system to ensure process stability and product quality.
equipment protection
The filter plate protects downstream sensors, valves, pumps, and control modules from particle damage.
Maintenance and replacement
Modular design facilitates quick disassembly and supports regular replacement to maintain filtering effectiveness.
Product advantages
High filtration accuracy: ensuring the purity of gas or liquid fluids and protecting process quality.
Low pressure drop: reduces fluid resistance and ensures stable flow of the system.
Corrosion resistant and clean resistant: Suitable for semiconductor cleanroom environments and chemical media.
Modular maintenance is convenient: easy to disassemble and replace, reducing downtime.
Good compatibility: designed specifically for AMAT series equipment, compatible with gas or liquid supply systems.
AMAT Applied Materials 0100-09110过滤板 产品展示
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