AMAT Applied Materials 0090-77327电子流量计 PDF资料
1.产 品 资 料 介 绍：
产品概述
AMAT 0090-77327 是 Applied Materials 半导体设备中的 电子流量计（Mass Flow Meter, MFM）。
该流量计主要用于 精确测量和监控工艺气体流量，为控制器提供实时流量反馈，实现半导体工艺中的气体配比、压力控制和工艺稳定性，是气体输送和工艺控制系统的关键部件。
技术参数（推断性质）
类型：电子质量流量计（Electronic Mass Flow Meter, MFM）。
测量介质：工艺用气体（如氩气、氮气、氧气、氢气等）。
流量范围：根据设备型号，可覆盖低流量到中高流量工艺需求。
输出信号：模拟信号（如 0–5 V、0–10 V 或 4–20 mA）或数字信号接口（如 TTL、RS-485）。
精度：高精度测量，确保工艺气体流量稳定和重复性良好。
接口类型：标准法兰或螺纹接口，适配气体管路安装。
特点：响应快速、抗振动和抗干扰能力强，适应半导体洁净室环境。
应用场景
工艺气体流量监控
实时测量沉积、刻蚀、清洗或检测工艺中的气体流量，确保精确配比。
闭环气体流量控制
与质量流量控制器（MFC）或控制器配合，实现自动调节气体流量的闭环控制。
工艺稳定性保障
精确流量数据用于控制工艺参数，如压力、气体浓度和反应速率，保证产品一致性。
设备维护与故障诊断
流量异常时提供报警信号，支持快速排查气路或传感器问题。
产品优势
高精度测量：保证工艺气体流量的精确控制。
快速响应：适应高速工艺和动态流量变化需求。
抗干扰能力强：在电磁和振动环境下保持稳定测量。
耐洁净室环境：材料与设计适应半导体工艺洁净标准。
模块化维护方便：可快速安装、更换或升级。
兼容性好：专为 AMAT 系列设备设计，与控制器和气路系统无缝匹配。
AMAT Applied Materials 0090-77327电子流量计 英文资料：
Product Overview
AMAT 0090-77327 is an electronic flow meter (MFM) used in Applied Materials semiconductor equipment.
This flowmeter is mainly used for precise measurement and monitoring of process gas flow, providing real-time flow feedback to the controller to achieve gas ratio, pressure control, and process stability in semiconductor processes. It is a key component of gas delivery and process control systems.
Technical parameters (inferred properties)
Type: Electronic Mass Flow Meter (MFM).
Measurement medium: Process gases (such as argon, nitrogen, oxygen, hydrogen, etc.).
Flow range: Depending on the device model, it can cover low flow to medium high flow process requirements.
Output signal: Analog signal (such as 0-5V, 0-10V, or 4-20mA) or digital signal interface (such as TTL, RS-485).
Accuracy: High precision measurement ensures stable process gas flow and good repeatability.
Interface type: standard flange or threaded interface, suitable for gas pipeline installation.
Features: Fast response, strong anti vibration and anti-interference ability, suitable for semiconductor cleanroom environment.
Application scenarios
Process gas flow monitoring
Real time measurement of gas flow during deposition, etching, cleaning, or detection processes to ensure accurate proportioning.
Closed loop gas flow control
Cooperate with a Mass Flow Controller (MFC) or controller to achieve closed-loop control of automatic gas flow regulation.
Process stability guarantee
Accurate flow data is used to control process parameters such as pressure, gas concentration, and reaction rate to ensure product consistency.
Equipment maintenance and fault diagnosis
Provide alarm signals when there is abnormal flow, and support quick troubleshooting of gas or sensor problems.
Product advantages
High precision measurement: ensuring precise control of process gas flow rate.
Quick response: Adapt to high-speed processes and dynamic flow changes.
Strong anti-interference ability: maintain stable measurement in electromagnetic and vibration environments.
Durable cleanroom environment: The materials and design are suitable for semiconductor process cleanliness standards.
Modular maintenance is convenient: it can be quickly installed, replaced, or upgraded.
Good compatibility: designed specifically for AMAT series devices, seamlessly matching with controllers and pneumatic systems.
AMAT Applied Materials 0090-77327电子流量计 产品展示
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