AMAT Applied Materials 0100-90491晶圆臂位置PCB卡 PDF资料
1.产 品 资 料 介 绍：
产品概述
AMAT 0100-90491 是 Applied Materials 半导体设备中的 晶圆臂位置 PCB 卡。
该模块主要用于 检测和控制晶圆搬运机械臂的位置与动作，将机械臂的位置信号传输给控制器，实现高精度的晶圆搬运与工艺协调，是半导体设备关键的运动控制和位置反馈组件。
技术参数（推断性质）
类型：位置检测与信号处理 PCB（Position Sensing & Control PCB）。
功能：
接收来自晶圆臂位置传感器（如编码器、光电传感器或霍尔传感器）的信号。
对信号进行调理、放大和转换，提供可供控制器处理的标准信号。
输出位置反馈至运动控制器，实现闭环运动控制。
信号接口：模拟或数字位置反馈接口，与机台控制器连接。
安装位置：机械臂驱动模块或控制柜内，靠近晶圆搬运机械臂安装。
特点：高精度、高速响应、低延迟、抗干扰能力强，适应半导体洁净环境。
应用场景
晶圆搬运机械臂位置检测
实时监测机械臂的 XY 或旋转位置，保证晶圆搬运的精确度。
闭环运动控制
与控制器配合，实现机械臂的精确定位和动作顺序控制。
工艺协调
根据机械臂位置反馈协调阀门、真空腔或其他执行器的动作，确保工艺流程顺利。
设备维护与模块替换
PCB 模块化设计便于快速拆装和更换，减少设备停机时间。
AMAT Applied Materials 0100-90491晶圆臂位置PCB卡 英文资料：
Product Overview
AMAT 0100-90491 is a wafer arm position PCB card in Applied Materials semiconductor equipment.
This module is mainly used to detect and control the position and action of the wafer handling robot arm, transmit the position signal of the robot arm to the controller, and achieve high-precision wafer handling and process coordination. It is a key motion control and position feedback component of semiconductor equipment.
Technical parameters (inferred properties)
Type: Position Sensing&Control PCB.
Function:
Receive signals from wafer arm position sensors such as encoders, photoelectric sensors, or Hall sensors.
Condition, amplify, and convert signals to provide standard signals that can be processed by the controller.
Output position feedback to the motion controller to achieve closed-loop motion control.
Signal interface: Analog or digital position feedback interface, connected to the machine controller.
Installation location: Inside the robotic arm drive module or control cabinet, near the wafer handling robotic arm for installation.
Features: High precision, high-speed response, low latency, strong anti-interference ability, suitable for semiconductor clean environments.
Application scenarios
Position detection of wafer handling robotic arm
Real time monitoring of the XY or rotational position of the robotic arm to ensure the accuracy of wafer handling.
Closed-loop motion control
Cooperate with the controller to achieve precise positioning and action sequence control of the robotic arm.
Process coordination
Coordinate the actions of valves, vacuum chambers, or other actuators based on the position feedback of the robotic arm to ensure a smooth process flow.
Equipment maintenance and module replacement
PCB modular design facilitates quick disassembly and replacement, reducing equipment downtime.
AMAT Applied Materials 0100-90491晶圆臂位置PCB卡 产品展示
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