AMAT Applied Materials 0110-00077步进驱动器模块 PDF资料
1.产 品 资 料 介 绍：
产品概述
AMAT 0110-00077 是 Applied Materials 半导体设备中的 步进驱动器模块。
该模块主要用于 驱动步进电机，实现精确定位和运动控制，在设备晶圆搬运、阀门调节或机械手臂等系统中提供高精度、可控的运动输出。
技术参数（推断性质）
类型：步进电机驱动器模块（Stepper Motor Driver Module）。
功能：
接收控制器发出的脉冲或运动指令。
输出适合步进电机的驱动电流和电压，实现精确转动。
支持电流调节、过流保护、故障检测等功能。
输入信号：步进脉冲信号、方向信号及使能信号。
输出信号：驱动步进电机的相电流或相电压。
安装位置：控制柜或模块槽位，靠近所驱动步进电机安装。
特点：高精度、快速响应、抗干扰能力强，适应半导体洁净和振动环境。
应用场景
晶圆搬运系统
驱动步进电机控制机械手臂移动，实现晶圆精确定位和传输。
阀门或执行器控制
调节气体阀门或流量控制装置，实现工艺精密控制。
闭环或开环运动控制
与传感器或控制器配合，实现步进电机的精确定位或速度控制。
设备维护与模块替换
模块化设计便于快速更换或升级，减少设备停机时间。
产品优势
高精度定位：满足半导体工艺对运动控制的严格要求。
快速响应：适应高速工艺或精密机械手动作需求。
抗干扰能力强：在复杂电磁环境下保持稳定驱动输出。
安全可靠：具备过流保护、故障检测及模块化维护设计。
兼容性好：专为 AMAT 系列设备设计，接口与控制系统无缝匹配。
AMAT Applied Materials 0110-00077步进驱动器模块 英文资料：
Product Overview
AMAT 0110-00077 is a stepper driver module in Applied Materials semiconductor equipment.
This module is mainly used to drive stepper motors, achieve precise positioning and motion control, and provide high-precision and controllable motion output in equipment wafer handling, valve adjustment, or robotic arm systems.
Technical parameters (inferred properties)
Type: Stepper Motor Driver Module.
Function:
Receive pulses or motion commands from the controller.
Output suitable driving current and voltage for stepper motors to achieve precise rotation.
Support functions such as current regulation, overcurrent protection, and fault detection.
Input signals: step pulse signal, direction signal, and enable signal.
Output signal: The phase current or phase voltage that drives the stepper motor.
Installation location: Control cabinet or module slot, installed near the driven stepper motor.
Features: High precision, fast response, strong anti-interference ability, suitable for semiconductor clean and vibration environments.
Application scenarios
Wafer handling system
Drive the stepper motor to control the movement of the robotic arm, achieving precise positioning and transfer of wafers.
Valve or actuator control
Adjust gas valves or flow control devices to achieve precise process control.
Closed loop or open-loop motion control
Cooperate with sensors or controllers to achieve precise positioning or speed control of stepper motors.
Equipment maintenance and module replacement
Modular design facilitates quick replacement or upgrade, reducing equipment downtime.
Product advantages
High precision positioning: meets the strict requirements of semiconductor technology for motion control.
Quick response: Adapt to high-speed processes or precision robotic arm movements.
Strong anti-interference ability: maintains stable driving output in complex electromagnetic environments.
Safe and reliable: equipped with overcurrent protection, fault detection, and modular maintenance design.
Good compatibility: designed specifically for AMAT series devices, with seamless interface and control system matching.
AMAT Applied Materials 0110-00077步进驱动器模块 产品展示
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| IC3600KMRE2 | 531X137TRGAAG1 | IC3600AFGA1D1 |
| IC3600KMRD9 | 531X136TBGAAG1 | IC3600AFGA1C1 |
| IC3600KMRD2 | 531X135PRGBBG1 | IC3600AFGA1B |
| IC3600KMRC5 | 531X135PRGAYM2 | IC3600AFGA1 |
| IC3600KMRC2 | 531X135PRGAWM2 | IC3600ADNA1 |
| IC3600KMRB5 | 531X135PRGATM2 | IC3600ADN1A |
| IC3600KMRB2 | 531X135PRGAMM1 | IC3600ADAF1A |
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