AMAT Applied Materials 0190-09764可控硅电源 PDF资料
1.产 品 资 料 介 绍:
产品概述
AMAT 0190-09764 是 Applied Materials 半导体设备中的 可控硅电源模块(Thyristor Power Supply)。
该模块用于为设备内部负载(如加热器、离子源、感应线圈或电机驱动器)提供 可控、高稳定性的交流或直流电源,通过可控硅调节输出功率,实现精确的工艺控制。
技术参数(推断性质)
类型:可控硅电源(Thyristor / SCR Power Supply)。
功能:
提供可调电压或电流输出,实现负载功率调节。
配合控制器实现闭环功率控制,提高工艺精度。
支持软启动与过载保护,确保负载安全。
输出类型:交流或直流,可调功率输出(根据负载需求)。
接口:电源输入端、控制信号接口(模拟或数字)、负载输出端。
安装位置:设备电源模块槽位或控制柜内。
特点:高精度、响应速度快、抗干扰能力强,适应半导体洁净环境。
应用场景
加热或功率控制
为加热器、感应线圈或等离子体源提供可控功率,实现温度或工艺功率调节。
电机或执行器驱动
提供可控电源支持步进电机、伺服电机或其他执行器动作。
闭环控制系统
与传感器和控制器配合,实现功率、温度或电流的精确闭环控制。
设备安全与保护
支持软启动、过流、过压及短路保护,降低设备损坏风险。
模块化维护与替换
可快速拆装和更换,减少设备停机时间。
AMAT Applied Materials 0190-09764可控硅电源 英文资料:
Product Overview
AMAT 0190-09764 is a thyristor power supply module in Applied Materials semiconductor equipment.
This module is used to provide controllable and highly stable AC or DC power supply for internal loads of the device, such as heaters, ion sources, induction coils, or motor drivers. The output power is adjusted through thyristors to achieve precise process control.
Technical parameters (inferred properties)
Type: Thyristor/SCR Power Supply.
Function:
Provide adjustable voltage or current output to achieve load power regulation.
Cooperate with the controller to achieve closed-loop power control and improve process accuracy.
Support soft start and overload protection to ensure load safety.
Output type: AC or DC, adjustable power output (according to load requirements).
Interfaces: power input terminal, control signal interface (analog or digital), load output terminal.
Installation location: in the slot of the equipment power module or inside the control cabinet.
Features: High precision, fast response speed, strong anti-interference ability, suitable for semiconductor clean environment.
Application scenarios
Heating or power control
Provide controllable power for heaters, induction coils, or plasma sources to achieve temperature or process power regulation.
Motor or actuator drive
Provide controllable power supply to support stepper motors, servo motors, or other actuator actions.
closed loop control system
Cooperate with sensors and controllers to achieve precise closed-loop control of power, temperature, or current.
Equipment safety and protection
Support soft start, overcurrent, overvoltage, and short-circuit protection to reduce the risk of equipment damage.
Modular maintenance and replacement
Can be quickly disassembled and replaced, reducing equipment downtime.
AMAT Applied Materials 0190-23441启动模块 产品展示
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4.其他英文产品
AMAT 0100-09022 Serial control card
AMAT 0100-03012 Bus expansion card
AMAT 0100-00195 Adapter switch card
IC3600KRSU1A | 531X139APMAJG2 | IC3600AIAC1 |
IC3600KRSU1 | 531X139APMAHG2 | IC3600AIAA1G1B |
IC3600KRST1A | 531X139APMAGM1 | IC3600AFRB1B1B |
IC3600KRSS2 | 531X139APMAFM1 | IC3600AFRB1 |
IC3600KRSS1A | 531X139APMAEM6 | IC3600AFRA1B1B |
IC3600KRSS1 | 531X139APMAEM1 | IC3600AFRA1A1A |
IC3600KRSR1 | 531X139APMAEG2 | IC3600AFRA1 |
IC3600KRSP1A | 531X139APMACM7 | IC3600AFGD1 |
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