AMAT Applied Materials C190238压力传感器 PDF资料
1.产 品 资 料 介 绍：
产品概述
AMAT C190238 是 Applied Materials 半导体设备使用的 压力传感器（Pressure Sensor）。
该传感器主要用于 实时监测真空腔体或工艺气路压力，为工艺控制系统提供关键反馈信号，确保半导体制造过程的稳定性和精度。
技术参数（结合 AMAT 压力传感器特性推断）
类型：压力传感器 / 压力变送器（Pressure Transducer）。
测量范围：适用于半导体工艺所需的 真空至低压范围，如 Torr 至大气压级。
输出信号：模拟信号（0–10 V 或 4–20 mA）或数字信号接口，供控制系统读取。
接口方式：法兰或螺纹接口，便于腔体或管路安装。
安装位置：工艺腔体、传输腔或气路分支管路。
特点：高精度、高重复性、快速响应，适应半导体洁净环境及耐腐蚀要求。
应用场景
真空腔体压力监控
在沉积（CVD、PVD）、刻蚀（Etch）或清洗腔体中实时检测压力。
气路系统监控与控制
配合质量流量控制器（MFC）和阀门实现闭环压力控制。
工艺稳定性保障
根据传感器反馈调节泵浦和阀门操作，确保工艺压力保持在设定范围。
安全联锁
当压力超出安全范围时触发系统联锁保护，避免设备损坏或工艺异常。
产品优势
高精度与高重复性：满足半导体工艺对压力控制的严格要求。
快速响应：适合实时闭环控制，实现精确动作调节。
耐腐蚀、洁净环境适应性强：适合半导体设备内部气体及真空环境。
模块化维护方便：可快速拆装或更换，降低设备停机时间。
兼容性好：专为 AMAT 系列设备设计，接口与控制系统完全匹配。
AMAT Applied Materials C190238压力传感器 英文资料：
Product Overview
AMAT C190238 is a pressure sensor used in Applied Materials semiconductor equipment.
This sensor is mainly used for real-time monitoring of vacuum chamber or process gas pressure, providing key feedback signals for process control systems to ensure the stability and accuracy of semiconductor manufacturing processes.
Technical parameters (inferred based on AMAT pressure sensor characteristics)
Type: Pressure Sensor/Pressure Transmitter.
Measurement range: Suitable for the vacuum to low pressure range required for semiconductor processes, such as Torr to atmospheric pressure.
Output signal: Analog signal (0-10 V or 4-20 mA) or digital signal interface for the control system to read.
Interface method: flange or threaded interface, convenient for installation in chambers or pipelines.
Installation location: Process chamber, transmission chamber, or gas branch pipeline.
Features: High precision, high repeatability, fast response, suitable for semiconductor clean environment and corrosion resistance requirements.
Application scenarios
Vacuum chamber pressure monitoring
Real time pressure detection in deposition (CVD, PVD), etching (Etch), or cleaning chambers.
Monitoring and control of pneumatic system
Collaborate with a Mass Flow Controller (MFC) and valves to achieve closed-loop pressure control.
Process stability guarantee
Adjust the pump and valve operation based on sensor feedback to ensure that the process pressure remains within the set range.
Safety interlock
When the pressure exceeds the safe range, the system interlock protection is triggered to avoid equipment damage or process abnormalities.
Product advantages
High precision and high repeatability: meet the strict requirements of pressure control in semiconductor processes.
Quick response: suitable for real-time closed-loop control, achieving precise action adjustment.
Corrosion resistance and strong adaptability to clean environments: suitable for gas and vacuum environments inside semiconductor equipment.
Modular maintenance is convenient: it can be quickly disassembled or replaced, reducing equipment downtime.
Good compatibility: Designed specifically for AMAT series devices, the interface and control system are perfectly matched.
AMAT Applied Materials C190238压力传感器 产品展示
3.其他产品
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GE IS430SNUAH1A I/O模块
GE F650BABF1G0HI 保护装置板卡
4.其他英文产品
AMAT 0100-09126 Serial control card
AMAT 0100-09117 Multi-function I/O card
AMAT 0100-09022 Serial control card
| IC3600LDEG1 | 531X139APMAYG2 | IC3600AOAA1D |
| IC3600LDDB1 | 531X139APMAXG2 | IC3600AOAA1A |
| IC3600LDDA1 | 531X139APMATG2 | IC3600AOAA1 |
| IC3600LDCA1 | 531X139APMASM7 | IC3600AOA |
| IC3600LCDA1B | 531X139APMASG2 | IC3600AMLG1A |
| IC3600LCDA1 | 531X139APMARM7 | IC3600AMLG1 |
| IC3600LBEA1 | 531X139APMAPG2 | IC3600AMLB1B |
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