AMAT Applied Materials 0100-70028机器人互连板 PDF资料
1.产 品 资 料 介 绍:
产品概述
AMAT 0100-70028 是 Applied Materials 半导体设备中用于 机器人系统的互连板。
该板卡主要功能是 实现机台内部机器人(如晶圆搬运机械手)与控制系统之间的信号连接与通信,确保机器人动作精确、协调,并与其他模块高效联动。
技术参数(推断性质)
类型:互连板 / 信号接口板(Interconnect Board)。
功能:
连接机器人控制器与电机驱动器、传感器及机台其他模块。
传递控制信号、反馈信号和电源信号,确保机器人运动精度。
接口类型:板载多路连接器,可能包括数字 I/O、模拟信号接口及总线接口。
安装位置:机器人控制子系统或设备机柜中,与机械手及控制器模块对接。
特点:高可靠性、抗干扰、模块化设计,适应半导体洁净及真空环境。
应用场景
晶圆搬运系统
支持机械手臂在不同腔体之间搬运晶圆,实现精确定位与动作协调。
机器人控制信号汇集
汇总来自控制器、传感器和驱动器的信号,实现运动命令下发及状态反馈。
多模块协同运行
通过互连板实现机器人与阀门、传感器、真空腔体等设备子系统的联动控制。
设备维护与替换
模块化设计便于快速更换或升级,减少机器人系统停机时间。
产品优势
高信号完整性:保证机器人控制指令的精确传递。
抗干扰能力强:适应半导体设备电磁环境和高速动作需求。
模块化维护方便:可快速拆装或更换,降低维护难度。
兼容性好:专为 AMAT 机台机器人系统设计,接口与控制器完全匹配。
AMAT Applied Materials 0100-70028机器人互连板 英文资料:
Product Overview
AMAT 0100-70028 is an interconnect board used for robot systems in Applied Materials semiconductor equipment.
The main function of this board is to achieve signal connection and communication between the internal robots of the machine (such as wafer handling robots) and the control system, ensuring precise and coordinated robot actions, and efficient linkage with other modules.
Technical parameters (inferred properties)
Type: Interconnect Board/Signal Interface Board.
Function:
Connect the robot controller with motor drivers, sensors, and other modules of the machine.
Transmit control signals, feedback signals, and power signals to ensure the accuracy of robot motion.
Interface type: onboard multi way connector, which may include digital I/O, analog signal interface, and bus interface.
Installation location: In the robot control subsystem or equipment cabinet, it is connected to the robotic arm and controller module.
Features: High reliability, anti-interference, modular design, suitable for semiconductor clean and vacuum environments.
Application scenarios
Wafer handling system
Support robotic arms to transport wafers between different chambers, achieving precise positioning and coordinated movements.
Robot control signal collection
Summarize signals from controllers, sensors, and drivers to issue motion commands and provide status feedback.
Multi module collaborative operation
Realize linkage control between robots and subsystems such as valves, sensors, vacuum chambers, etc. through interconnection boards.
Equipment maintenance and replacement
Modular design facilitates quick replacement or upgrade, reducing robot system downtime.
Product advantages
High signal integrity: ensuring precise transmission of robot control instructions.
Strong anti-interference ability: adaptable to the electromagnetic environment and high-speed operation requirements of semiconductor equipment.
Modular maintenance is convenient: it can be quickly disassembled or replaced, reducing maintenance difficulty.
Good compatibility: Designed specifically for AMAT machine robot systems, the interface and controller are perfectly matched.
AMAT Applied Materials 0100-70028机器人互连板 产品展示
3.其他产品
ROCKWELL T8850 控制系统模块
ROCKWELL T8830 输入端子板
HIMA F3DIO 20/8 02 可编程控制器
4.其他英文产品
AMAT 0100-76124 Multiplexer switch card
AMAT 0100-40021 Analog output card
AMAT 0100-35173 Digital I/O card
IC3600LRDD1C1B | 531X174RCCADG1 | IC3600AVLA1 |
IC3600LRDD1 | 531X171TMAAFG2 | IC3600AVIB1M1C |
IC3600LRDC1 | 531X171TMAAEG2 | IC3600AVIB1L1B |
IC3600LPGC1 | 531X171TMAADG2 | IC3600AVIB1K |
IC3600LPGB1 | 531X171TMAABG2 | IC3600AVIB1 |
IC3600LPGA1 | 531X171TMAABG1 | IC3600AVIA1M1 |
IC3600LOEA1 | 531X170TBSAGG1 | IC3600AVIA1L |
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