AMAT Applied Materials 0010-70321开衩阀门 PDF资料
1.产 品 资 料 介 绍：
产品概述
AMAT 0010-70321 是 Applied Materials 半导体设备中的 开衩阀门（Slit Valve）。
在半导体工艺设备（如 PVD、CVD、Etch 等真空腔体）中，开衩阀门是用来 隔离或连接真空腔体与传输腔（Transfer Chamber） 的关键部件，通常用于晶圆的装载和转移过程。
技术参数（典型特性，结合 AMAT 阀门系列推断）
类型：开衩阀门（Slit Valve Assembly）。
功能：
在传输腔与工艺腔之间形成可开关的隔离屏障。
在开阀时提供晶圆通过通道，在关阀时保持真空密封。
驱动方式：常见为 气动驱动（压缩空气控制活塞或气缸）。
密封方式：O 型圈或专用密封件，确保 真空密封性。
材质：阀体多为 铝合金或不锈钢，密封件为 高分子耐腐蚀材料。
特点：支持高频次开关，耐等离子体腐蚀，寿命长。
应用场景
真空腔体隔离
在晶圆传输腔与沉积腔、刻蚀腔、检测腔之间切换，确保不同腔体工艺环境独立。
晶圆传输
在开阀时提供真空通道，供真空机械手将晶圆装入或取出工艺腔。
工艺稳定性控制
在工艺进行中保持阀门关闭，确保腔体内真空压力和气氛环境稳定。
安全保护
阀门联锁系统确保未达到安全条件时阀门不会误开，防止腔体失压或晶圆受损。
AMAT Applied Materials 0010-70321开衩阀门 英文资料：
Product Overview
AMAT 0010-70321 is a slit valve in Applied Materials semiconductor equipment.
In semiconductor process equipment such as PVD, CVD, Etch, etc. vacuum chambers, slit valves are key components used to isolate or connect vacuum chambers and transfer chambers, typically used in wafer loading and transfer processes.
Technical parameters (typical characteristics, inferred from AMAT valve series)
Type: Slit Valve Assembly.
Function:
Form a switchable isolation barrier between the transmission chamber and the process chamber.
Provide wafer passage when opening the valve and maintain vacuum sealing when closing the valve.
Drive mode: commonly used is pneumatic drive (compressed air control piston or cylinder).
Sealing method: O-ring or specialized seal to ensure vacuum sealing.
Material: The valve body is mostly made of aluminum alloy or stainless steel, and the sealing element is made of polymer corrosion-resistant material.
Features: Supports high-frequency switching, resistant to plasma corrosion, and has a long lifespan.
Application scenarios
Vacuum chamber isolation
Switch between the wafer transfer chamber and the deposition chamber, etching chamber, and detection chamber to ensure independent process environments for different chambers.
Wafer transfer
Provide a vacuum channel during valve opening for the vacuum robotic arm to load or remove wafers from the process chamber.
Process stability control
Keep the valve closed during the process to ensure stable vacuum pressure and atmosphere inside the chamber.
safety protection
The valve interlocking system ensures that the valve will not open incorrectly when safety conditions are not met, preventing chamber pressure loss or wafer damage.
AMAT Applied Materials 0010-70321开衩阀门 产品展示
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