AMAT Applied Materials 0870-01002步进电机驱动器 PDF资料
1.产 品 资 料 介 绍：
产品特点
专用性设计
为 AMAT 半导体工艺设备定制，适配机台内部运动控制需求。
与 AMAT 的控制系统、总线接口高度兼容，减少调试与改装工作。
精确运动控制
支持步进电机的高分辨率细分驱动，实现腔体内部机械臂、阀门或载具的精确定位。
保证晶圆搬运、机械调节等环节的重复精度与一致性。
高可靠性与稳定性
适应半导体设备长时间连续运行的要求，具备抗干扰与过热保护机制。
在高洁净、真空及温度波动环境下仍能稳定工作。
模块化结构
作为可更换的驱动器模块，支持快速安装与更换，减少停机维护时间。
接口标准化，便于与其他控制模块协同。
保护与诊断功能
集成过流、过压、过热保护，避免电机与控制器损坏。
部分版本具备故障指示或状态输出，便于维护人员快速诊断问题。
应用适配性
常用于 AMAT 设备中晶圆传输机械手、气动/电动阀门执行器、升降机构等运动控制场合。
提供平滑的加减速控制，降低对精密部件的机械冲击。
AMAT Applied Materials 0870-01002步进电机驱动器 英文资料：
Product Features
Specialized design
Customize AMAT semiconductor process equipment to meet the internal motion control requirements of the machine.
Highly compatible with AMAT's control system and bus interface, reducing debugging and modification work.
Precise motion control
Support high-resolution subdivision drive of stepper motors to achieve precise positioning of mechanical arms, valves, or vehicles inside the cavity.
Ensure the repeatability and consistency of processes such as wafer handling and mechanical adjustment.
High reliability and stability
Adapt to the requirements of long-term continuous operation of semiconductor equipment, with anti-interference and overheating protection mechanisms.
It can still work stably in high cleanliness, vacuum, and temperature fluctuation environments.
Modular structure
As a replaceable driver module, it supports quick installation and replacement, reducing downtime for maintenance.
Standardization of interfaces facilitates collaboration with other control modules.
Protection and diagnostic functions
Integrated overcurrent, overvoltage, and overheating protection to prevent damage to the motor and controller.
Some versions have fault indication or status output, making it easy for maintenance personnel to quickly diagnose problems.
Application adaptability
Commonly used in motion control applications such as crystal transfer manipulators, pneumatic/electric valve actuators, and lifting mechanisms in AMAT equipment.
Provide smooth acceleration and deceleration control to reduce mechanical impact on precision components.
AMAT Applied Materials 0870-01002步进电机驱动器 产品展示
3.其他产品
GE VME-5565 反射存储器
Metso MBMT120 控制器模块
METSO D202275 控制器
4.其他英文产品
AMAT 0100-20313 Serial control module
AMAT 0100-09153 Transfer switch module
AMAT 0100-09146 Semiconductor module
| IC3600SFPB1B1C | 6DD1683-0CC0 | IC3600SSVB1 |
| IC3600SFPB1B | 6DD1683-0BE5 | IC3600SSVA1F1C |
| IC3600SFPB1 | 6SC6504-0AF01 | IC3600SSVA1 |
| IC3600SFKK1 | 531X300CCHALM3 | IC3600SSLD1H1D |
| IC3600SFKD1C |  531X300CCHALG2 | IC3600SSLD1F1B |
| IC3600SFKD1 | 531X300CCHAJM2 | IC3600SSLD1E |
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