AMAT Applied Materials 0090-90140控制器模块 PDF资料
1.产 品 资 料 介 绍：
产品应用领域
半导体工艺设备真空系统
用于 AMAT 的真空工艺设备（如 CVD、PVD、Etch 等），主要负责 真空腔体的泵浦、阀门、压力调节。
确保工艺腔室内维持稳定的真空环境，以满足薄膜沉积、刻蚀、离子注入等工艺要求。
真空泵与气体流量控制
控制干泵、涡轮分子泵等设备的启停与运行参数。
协调质量流量控制器（MFC）、阀门的开闭，实现 气体输入与排出 的精准管理。
设备安全与联锁保护
通过监测腔体压力、阀门状态、泵速等，触发安全联锁，避免真空环境异常导致腔体损坏或工艺失败。
在设备启动、停机及维护模式中，提供自动化的真空控制逻辑。
数据采集与系统通讯
将真空系统运行数据（压力值、阀门状态、泵速）传送至主控制计算机。
与 AMAT 设备的中央控制系统进行通讯，实现多模块联动。
设备维修与替换
作为 AMAT 设备的专用模块，0090-90140 常见于 备件更换和维护 场景，用于快速恢复机台真空控制能力，减少停机时间。
AMAT Applied Materials 0090-90140控制器模块 英文资料：
Product application areas
Semiconductor process equipment vacuum system
Vacuum process equipment used for AMAT (such as CVD, PVD, Etch, etc.), mainly responsible for pumping, valves, and pressure regulation of the vacuum chamber.
Ensure a stable vacuum environment is maintained inside the process chamber to meet the requirements of thin film deposition, etching, ion implantation, and other processes.
Vacuum pump and gas flow control
Control the start stop and operation parameters of equipment such as dry pumps and turbo molecular pumps.
Coordinate the opening and closing of Mass Flow Controllers (MFCs) and valves to achieve precise management of gas input and discharge.
Equipment safety and interlock protection
By monitoring chamber pressure, valve status, pump speed, etc., safety interlocks are triggered to prevent chamber damage or process failure caused by abnormal vacuum environment.
Provide automated vacuum control logic during equipment startup, shutdown, and maintenance modes.
Data collection and system communication
Transfer the operating data of the vacuum system (pressure value, valve status, pump speed) to the main control computer.
Communicate with the central control system of AMAT equipment to achieve multi module linkage.
Equipment maintenance and replacement
As a dedicated module for AMAT equipment, 0090-90140 is commonly used in spare parts replacement and maintenance scenarios to quickly restore machine vacuum control capabilities and reduce downtime.
AMAT Applied Materials 0090-90140控制器模块 产品展示
3.其他产品
Honeywell 2104B2131气体探测器
GE VME-5565 反射存储器
Metso MBMT120 控制器模块
4.其他英文产品
AMAT 0190-00285 Matrix switch module
AMAT 0100-20458 Multifunctional I/O module
AMAT 0100-20313 Serial control module
| IC3600SHPB1 | 6DD1683-0BB0 | IC3600SSZD1 |
| IC3600SHP1E1 | 6DD1682-0DA1 | IC3600SSZC1 |
| IC3600SHCV1B | 6DD1682-0CH2 | IC3600SSZB1K |
| IC3600SHCN3C | 6DD1682-0CH1 | IC3600SSZB1C |
| IC3600SGDF1 | 6DD1682-0CH0 | IC3600SSZB1 |
| IC3600SGDE1 | 6DD1682-0CG0 | IC3600SSZA1 |
| IC3600SGDD1A1 | 6DD1682-0CF0 | IC3600SSVJ1 |
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