AMAT Applied Materials 0100-35207主机联锁模块 PDF资料 

1.产 品 资 料 介 绍：

AMAT Applied Materials 0100-35207 主机联锁模块

产品概述

0100-35207 是 AMAT 半导体设备中的 主机联锁模块（Host Interlock Module），用于实现设备各个工艺模块、执行器和控制系统之间的安全互锁。它通过监控设备状态和工艺条件，在异常或危险情况下触发保护措施，保障晶圆、工艺模块及设备的安全运行。

技术功能与特点

1. 安全互锁控制

• 监控设备各模块状态，如温度、压力、电源和机械位置。

• 在异常条件下自动触发停机、报警或切换操作，防止工艺和设备损坏。

2. 多模块协作

• 可与控制器、伺服模块、气动模块、水阀组件及电源模块协作，实现设备整体安全防护。

• 支持复杂工艺序列的安全逻辑控制。

3. 实时监测与响应

• 快速检测关键参数异常，实时响应并执行互锁动作。

• 提供状态信号反馈给主控制器，实现工艺与安全双重保障。

4. 模块化与易维护

• 设计紧凑，便于安装、拆卸和更换。

• 支持半导体洁净室环境下的长期运行和维护。

应用领域

1. 半导体工艺设备安全防护

• 对沉积、刻蚀、清洗等工艺模块实施状态监控和安全互锁。

2. 晶圆搬运系统

• 保障 Loadlock 升降机、机械手臂和气动模块在异常情况下安全停机。

3. 设备关键模块保护

• 协调冷盘组件、水阀组件、电源模块和伺服模块，防止过热、过压或流体异常。

4. 自动化生产线安全集成

• 与主控制器和量规模块协作，实现设备整体安全管理和远程监控。

AMAT Applied Materials 0100-35207主机联锁模块 英文资料：

AMAT Applied Materials 0100-35207 Host Interlocking Module

Product Overview

0100-35207 is the Host Interlock Module in AMAT semiconductor equipment, used to achieve secure interlocking between various process modules, actuators, and control systems of the equipment. It triggers protective measures in abnormal or dangerous situations by monitoring equipment status and process conditions, ensuring the safe operation of wafers, process modules, and equipment.

Technical functions and features

Security interlock control

Monitor the status of each module of the equipment, such as temperature, pressure, power supply, and mechanical position.

Automatically trigger shutdown, alarm or switching operations under abnormal conditions to prevent process and equipment damage.

Multi module collaboration

It can cooperate with controllers, servo modules, pneumatic modules, water valve components, and power modules to achieve overall safety protection of the equipment.

Support safety logic control for complex process sequences.

Real time monitoring and response

Quickly detect key parameter anomalies, respond in real-time, and execute interlocking actions.

Provide status signal feedback to the main controller to achieve dual protection of process and safety.

Modular and easy to maintain

Compact design, easy to install, disassemble, and replace.

Support long-term operation and maintenance in semiconductor cleanroom environments.

Application field

Safety protection of semiconductor process equipment

Implement status monitoring and safety interlock for process modules such as sedimentation, etching, and cleaning.

Wafer handling system

Ensure the safe shutdown of Loadlock elevators, robotic arms, and pneumatic modules in case of abnormal conditions.

Key module protection of equipment

Coordinate the cold plate components, water valve components, power module, and servo module to prevent overheating, overpressure, or fluid abnormalities.

Automated production line safety integration

Collaborate with the main controller and gauge module to achieve overall equipment safety management and remote monitoring.

AMAT Applied Materials 0100-35207主机联锁模块 产品展示      

3.其他产品

ABB 5761772-1A 印制板
ABB 5761731-4B 输入板
ABB 57617276-C 驱动板

4.其他英文产品

ABB DP820 Servo signal module
ABB DTCC901B 3BSC980006R152 Servo signal card
ABB PE1315A 5FSE707630-7 controller

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs

品牌：AMAT Applied Materials

型号：0100-35207主机联锁模块

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

                    WOODWARD、EMERSON、RELIANCE、DEIF、NI、XYVOM等

特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

应用行业：广泛应用于冶金、石油天然气、玻璃制造业、铝业、石油化工、煤矿、造纸印刷、纺织印染、机械、电子制造、汽车制造、烟草、塑胶机械、电力、水利、水处理/环保、市政工程、锅炉供暖、能源、输配电等

快递方式：国内顺丰、德邦、京东快递包邮，按照实际报价货期发货  P8123 DEIF DELOMATIC-3 DGU2机箱