AMAT Applied Materials 1400-00206控制器 PDF资料
1.产 品 资 料 介 绍：
AMAT Applied Materials 1400-00206 控制器
产品概述
1400-00206 是 AMAT 半导体设备中的 控制器（Controller），用于管理设备内的各类工艺模块、驱动模块、电源系统及气动系统。它通过采集传感器数据、发出控制信号，实现晶圆搬运、工艺参数调节及自动化操作，是设备核心控制单元。
技术功能与特点
多模块协调控制
控制伺服驱动模块、直流电源器、ESC 电源控制器、气动模块及温控系统。
支持多轴同步控制和复杂工艺动作序列，实现高精度工艺操作。
数据采集与分析
接收来自 PCB、量规控制器、传感器和执行器的实时数据。
对工艺参数进行分析和闭环调节，保证工艺一致性。
安全与保护
内置互锁、报警及异常处理逻辑，防止晶圆或设备损坏。
支持过压、过流、温度异常等保护机制。
模块化设计与兼容性
可快速安装、拆卸和升级，便于设备维护。
与 AMAT 各类模块（PCB、伺服、适配器、气动模块、电源模块等）无缝兼容。
应用领域
晶圆搬运系统
控制 Loadlock 升降机、机械手臂及气动模块，实现晶圆安全搬运。
工艺模块管理
协调加热器、冷盘组件、ESC 电源控制器及其他工艺模块的运行。
半导体自动化生产线
实现数据采集、工艺监控和远程控制，保障设备整体自动化。
安全互锁系统
与量规控制器、气动模块及驱动模块配合，确保晶圆及设备安全。
产品优势
多功能控制：协调多个工艺模块，实现复杂工艺操作。
高可靠性：适应半导体高洁净、高温环境，长期稳定运行。
安全性强：多重互锁和保护机制，降低晶圆和设备风险。
模块化设计：便于拆装、维护和升级，减少停机时间。
兼容性广：可与 AMAT 控制器、PCB、伺服模块、电源模块及气动模块无缝集成。
AMAT Applied Materials 1400-00206控制器 英文资料：
AMAT Applied Materials 1400-00206 Controller
Product Overview
1400-00206 is a controller in AMAT semiconductor equipment, used to manage various process modules, drive modules, power systems, and pneumatic systems inside the equipment. It collects sensor data and sends control signals to achieve wafer handling, process parameter adjustment, and automated operation, and is the core control unit of the equipment.
Technical functions and features
Multi module coordinated control
Control servo drive module, DC power supply, ESC power controller, pneumatic module, and temperature control system.
Support multi axis synchronous control and complex process action sequences to achieve high-precision process operations.
Data collection and analysis
Receive real-time data from PCBs, gauge controllers, sensors, and actuators.
Analyze and closed-loop adjust process parameters to ensure process consistency.
Security and protection
Built in interlock, alarm, and exception handling logic to prevent damage to wafers or equipment.
Support protection mechanisms such as overvoltage, overcurrent, and abnormal temperature.
Modular design and compatibility
Can be quickly installed, disassembled, and upgraded for easy equipment maintenance.
Seamless compatibility with various AMAT modules (PCB, servo, adapter, pneumatic module, power module, etc.).
Application field
Wafer handling system
Control the Loadlock elevator, robotic arm, and pneumatic module to achieve safe wafer handling.
Process module management
Coordinate the operation of heaters, cooling components, ESC power controllers, and other process modules.
Semiconductor automation production line
Realize data collection, process monitoring, and remote control to ensure overall automation of equipment.
Security interlock system
Cooperate with gauge controllers, pneumatic modules, and drive modules to ensure wafer and equipment safety.
Product advantages
Multi functional control: Coordinate multiple process modules to achieve complex process operations.
High reliability: Suitable for semiconductor high cleanliness, high temperature environment, and long-term stable operation.
Strong security: Multiple interlocking and protection mechanisms reduce wafer and equipment risks.
Modular design: easy to disassemble, maintain, and upgrade, reducing downtime.
Wide compatibility: compatible with AMAT controllers PCB、 Seamless integration of servo module, power module, and pneumatic module.
AMAT Applied Materials 1400-00206控制器 产品展示
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| R46GENA-HS-NS-NV-00 | R33GENT-TS-NS-NV-00 | R43GENA-R2-NS-NV-00 |
| R46GEBA-R2-NS-VS-00 | R45GENA-R2-NS-NV-00 | S21HNNA-RNN6-00 |
| R46GEBA-R2-NS-NV-02 | R22H5NA-R1-NS-NV-17 | R24SSNA-R1-NS-NV-03 |
| R46GEBA-R2-NS-NV-00 | SC103-001-T2 | S32GNNA-RNVM-00 |
| R46GEBA-HS-NS-NV-00 | R24SSNA-RT-NS-NV-03 | S21HSNA-RNNM-04 |
| R46GEAA-R2-NS-NV-00 | R45GMNA-TS-NS-NV-00 | R43HENA-R2-NS-VS-00 |
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