AMAT Applied Materials M3399X适配器 PDF资料
1.产 品 资 料 介 绍:
AMAT Applied Materials M3399X 适配器
产品概述
M3399X 是 AMAT 半导体设备中的 适配器模块(Adapter Module),用于实现不同电子或控制模块之间的接口匹配与信号、电源转换。它在设备内部起到桥接作用,使控制器、PCB、伺服模块、气动模块及其他执行器能够可靠协同工作,保证设备运行稳定性和工艺一致性。
技术功能与特点
接口匹配与连接
提供标准化连接端口,实现不同模块之间的电气或信号兼容。
支持信号、电源和逻辑控制信号的传输与转换。
信号与电源转换
可对输入输出信号进行电压、电流或逻辑级别调整。
支持多通道信号或电源输出,满足复杂工艺控制需求。
安全与保护功能
内置过流、过压和短路保护机制,防止模块或设备损坏。
可与设备控制器和互锁系统协作,提高晶圆及设备安全性。
模块化设计
支持快速安装、拆卸和更换,便于维护与升级。
结构紧凑,适应半导体洁净室和连续运行环境。
应用领域
半导体工艺控制系统
连接控制器、直流电源器、伺服模块、PCB、气动模块,实现信号和电源兼容。
晶圆搬运系统
为升降机、Loadlock 和气动执行器提供接口转换与电气连接。
工艺模块集成
在沉积、刻蚀、清洗等设备中,适配不同模块或不同版本控制器。
自动化生产线
实现模块化组件快速互换,提高设备维护效率和工艺连续性。
AMAT Applied Materials M3399X适配器 英文资料:
AMAT Applied Materials M3399X Adapter
Product Overview
M3399X is an adapter module in AMAT semiconductor equipment, used to achieve interface matching and signal/power conversion between different electronic or control modules. It serves as a bridge within the device, enabling the controller PCB、 The servo module, pneumatic module, and other actuators can work together reliably to ensure the stability of equipment operation and process consistency.
Technical functions and features
Interface matching and connection
Provide standardized connection ports to achieve electrical or signal compatibility between different modules.
Support the transmission and conversion of signals, power, and logic control signals.
Signal and power conversion
It can adjust the voltage, current, or logic level of input and output signals.
Support multi-channel signal or power output to meet complex process control requirements.
Security and protection functions
Built in overcurrent, overvoltage, and short-circuit protection mechanisms to prevent module or device damage.
Can collaborate with device controllers and interlock systems to improve wafer and equipment security.
modular design
Support quick installation, disassembly, and replacement for easy maintenance and upgrading.
Compact structure, suitable for semiconductor cleanrooms and continuous operation environments.
Application field
Semiconductor Process Control System
Connect the controller, DC power supply, servo module PCB、 Pneumatic module, achieving compatibility between signals and power supply.
Wafer handling system
Provide interface conversion and electrical connections for elevators, Loadlocks, and pneumatic actuators.
Process module integration
Adapt to different modules or versions of controllers in sedimentation, etching, cleaning and other equipment.
Automatic production line
Realize rapid exchange of modular components, improve equipment maintenance efficiency and process continuity.
AMAT Applied Materials M3399X适配器 产品展示
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