AMAT Applied Materials 30712650200控制器模块 PDF资料
1.产 品 资 料 介 绍：
AMAT Applied Materials 30712650200 控制器模块
产品概述
30712650200 是 AMAT 半导体设备中的 控制器模块（Controller Module），用于管理和协调设备内的各类工艺模块、电源系统、伺服驱动及气动系统。它通过接收传感器数据、发出控制信号，实现晶圆搬运、工艺参数调节及设备自动化控制，是半导体工艺设备的核心控制单元。
技术功能与特点
多模块协调控制
控制电源模块、气动模块、伺服驱动模块及温控系统。
支持多轴同步控制和复杂工艺动作序列。
数据采集与处理
接收来自传感器、PCB、量规模块及执行器的实时数据。
对工艺参数进行分析与调整，实现闭环控制。
安全与保护功能
内置互锁、报警及异常处理逻辑，防止晶圆或设备损坏。
支持过压、过流、温度异常等保护机制。
模块化与兼容性
可快速安装、拆卸和升级，便于维护。
与 AMAT 各类控制器、PCB、伺服模块及电源模块无缝兼容。
应用领域
晶圆搬运系统
控制 Loadlock 升降机、机械手臂及气动模块，实现晶圆安全搬运。
工艺模块管理
协调加热器、冷盘组件、ESC 电源控制器及其他工艺模块的运行。
自动化生产线控制
集成数据采集、工艺监控和远程控制，实现设备整体自动化。
安全互锁系统
与气动模块、量规控制器及驱动模块配合，保障设备和晶圆安全。
AMAT Applied Materials 30712650200控制器模块 英文资料：
AMAT Applied Materials 30712650200 Controller Module
Product Overview
30712650200 is a controller module in AMAT semiconductor equipment, used to manage and coordinate various process modules, power systems, servo drives, and pneumatic systems within the equipment. It is the core control unit of semiconductor process equipment, which achieves wafer handling, process parameter adjustment, and equipment automation control by receiving sensor data and sending control signals.
Technical functions and features
Multi module coordinated control
Control power module, pneumatic module, servo drive module, and temperature control system.
Support multi axis synchronous control and complex process action sequences.
data acquisition and processing
Received from sensors PCB、 Real time data of gauge module and actuator.
Analyze and adjust process parameters to achieve closed-loop control.
Security and protection functions
Built in interlock, alarm, and exception handling logic to prevent damage to wafers or equipment.
Support protection mechanisms such as overvoltage, overcurrent, and abnormal temperature.
Modularity and compatibility
Can be quickly installed, disassembled, and upgraded for easy maintenance.
Various AMAT controllers PCB、 The servo module and power module are seamlessly compatible.
Application field
Wafer handling system
Control the Loadlock elevator, robotic arm, and pneumatic module to achieve safe wafer handling.
Process module management
Coordinate the operation of heaters, cooling components, ESC power controllers, and other process modules.
Automated production line control
Integrate data collection, process monitoring, and remote control to achieve overall automation of equipment.
Security interlock system
Cooperate with pneumatic modules, gauge controllers, and drive modules to ensure equipment and wafer safety.
AMAT Applied Materials 30712650200控制器模块 产品展示
3.其他产品
KUC711AE01 伺服控制器
HIEB200846 伺服驱动器
HESG437899 电源接口模块
4.其他英文产品
ABB 5SDD1060F0001 3BHL001863P0001 module
ABB 5SGX1060H0003 Drive input module
ABB 5SGX10H6004 High voltage thyristor module
| R46GSNA-TS-NS-VS-02 | R33SSNC-SS-NS-NV-02 | R32GMP-R2-NS-NV-07 |
| R46GSNA-TS-NS-NV-12 | R32GENP-R2-NS-VS-00 | R22GENT-TS-NS-NV-00 |
| R46GSNA-TS-NS-NV-11 | R21HENA-R1-NS-NV-01 | R33GSNC-HS-NS-NV-03 |
| R46GSNA-TS-NS-NV-09 | R43GENA-TS-NS-VS-00 | R34SSNT-TS-NS-NV-03 |
| R46GSNA-TS-NS-NV-08 | R22GMNA-R1-NS-NV-03 | R45GENA-R2-NS-VS-04 |
| R46GSNA-SS-NS-VS-04 | R34JSNC-TS-ND-NV-02 | R24GENA-R1-NS-NV-01 |
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