AMAT Applied Materials DAS200印刷电路板 PDF资料
1.产 品 资 料 介 绍:
AMAT Applied Materials DAS200 印刷电路板(PCB)
产品概述
DAS200 是 AMAT 半导体设备中的 印刷电路板(PCB)模块,主要用于数据采集(Data Acquisition)和控制信号处理。它作为工艺设备控制系统的重要电子基础,承担信号采集、传输及模块间接口连接任务,是设备运行和工艺控制的核心电子组件之一。
技术功能与特点
数据采集与处理
实时采集来自传感器、执行器及控制器的信号数据。
对采集的模拟与数字信号进行处理和转换,为工艺控制提供精确信息。
模块接口与信号传输
提供标准化接口,与控制器、电源模块、伺服控制模块及气动模块连接。
支持高速数据传输,确保工艺参数的实时监控。
高可靠性设计
PCB 材料和电路设计适应半导体设备的高洁净、高温及长期运行环境。
具备抗干扰、耐腐蚀和过载保护能力。
模块化与易维护
可快速拆装,更换或升级,减少设备停机时间。
设计符合半导体洁净室标准,便于清洁和维护。
应用领域
半导体工艺设备控制系统
用于 CVD、PVD、ALD、刻蚀及清洗设备的数据采集和工艺信号处理。
电源与执行器控制
支持直流电源器、ESC 电源控制器和伺服控制模块的信号接口和监控。
气动与机械执行器系统
与气动模块和升降机系统配合,实现晶圆搬运及工艺动作的精确控制。
自动化生产线集成
实现设备多模块的数据集中采集、工艺监控和远程控制。
AMAT Applied Materials DAS200印刷电路板 英文资料:
AMAT Applied Materials DAS200 Printed Circuit Board (PCB)
Product Overview
DAS200 is a printed circuit board (PCB) module in AMAT semiconductor equipment, mainly used for data acquisition and control signal processing. It serves as an important electronic foundation for process equipment control systems, responsible for signal acquisition, transmission, and interface connection between modules. It is one of the core electronic components for equipment operation and process control.
Technical functions and features
data acquisition and processing
Real time collection of signal data from sensors, actuators, and controllers.
Process and convert the collected analog and digital signals to provide accurate information for process control.
Module interface and signal transmission
Provide standardized interfaces to connect with controllers, power modules, servo control modules, and pneumatic modules.
Support high-speed data transmission to ensure real-time monitoring of process parameters.
High reliability design
PCB materials and circuit design are suitable for the high cleanliness, high temperature, and long-term operating environment of semiconductor equipment.
Capable of anti-interference, corrosion resistance, and overload protection.
Modular and easy to maintain
Can be quickly disassembled, replaced or upgraded, reducing equipment downtime.
Designed to comply with semiconductor cleanroom standards for easy cleaning and maintenance.
Application field
Semiconductor process equipment control system
Used for data acquisition and process signal processing of CVD, PVD, ALD, etching, and cleaning equipment.
Power supply and actuator control
Support signal interfaces and monitoring for DC power supplies, ESC power controllers, and servo control modules.
Pneumatic and mechanical actuator system
Cooperate with pneumatic modules and elevator systems to achieve precise control of wafer handling and process actions.
Automated production line integration
Realize centralized data collection, process monitoring, and remote control of multiple device modules.
AMAT Applied Materials DAS200印刷电路板 产品展示
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