AMAT Applied Materials 0120-90146量规控制器模块 PDF资料
1.产 品 资 料 介 绍：
AMAT Applied Materials 0120-90146 量规控制器模块
产品概述
0120-90146 是 AMAT 半导体设备中的 量规控制器模块（Gauge Controller Module），主要用于管理设备内的压力、真空或气体流量传感器（Gauge），对工艺腔体和气路系统进行实时监控和控制。该模块可与工艺控制器、气动模块及电源模块协同工作，实现工艺参数的精确测量与控制。
技术功能与特点
实时传感器管理
监控压力传感器、真空传感器、流量计等关键测量装置的数据。
提供高精度读数，确保工艺腔体压力和气体流量稳定。
闭环控制能力
将传感器数据反馈给主控制器，实现压力或流量的自动调节。
支持多通道数据采集与控制，满足复杂工艺要求。
接口与通信能力
可与 AMAT 控制器、气动模块、泵系统及电源模块无缝连接。
支持数据上传和远程监控，实现自动化生产线集成。
安全与保护功能
内置异常报警和互锁逻辑，当测量值超出安全范围时触发保护措施。
防止腔体压力异常或气路失控，保障晶圆和设备安全。
模块化设计
可快速安装、拆卸和更换，便于设备维护和升级。
设计适应半导体洁净室环境，支持长期连续运行。
AMAT Applied Materials 0120-90146量规控制器模块 英文资料：
AMAT Applied Materials 0120-90146 Gauge Controller Module
Product Overview
0120-90146 is the Gauge Controller Module in AMAT semiconductor equipment, mainly used to manage pressure, vacuum, or gas flow sensors (Gauge) inside the equipment, and to monitor and control the process chamber and gas path system in real time. This module can work in conjunction with process controllers, pneumatic modules, and power modules to achieve precise measurement and control of process parameters.
Technical functions and features
Real time sensor management
Monitor data from key measuring devices such as pressure sensors, vacuum sensors, and flow meters.
Provide high-precision readings to ensure stable pressure and gas flow in the process chamber.
Closed loop control capability
Feedback sensor data to the main controller to achieve automatic adjustment of pressure or flow rate.
Support multi-channel data acquisition and control to meet complex process requirements.
Interface and Communication Capability
It can seamlessly connect with AMAT controllers, pneumatic modules, pump systems, and power modules.
Support data upload and remote monitoring to achieve automated production line integration.
Security and protection functions
Built in abnormal alarm and interlock logic, triggering protective measures when the measured value exceeds the safe range.
Prevent abnormal chamber pressure or loss of control of the gas path, ensuring the safety of wafers and equipment.
modular design
It can be quickly installed, disassembled, and replaced, making it easy to maintain and upgrade the equipment.
Designed to adapt to semiconductor cleanroom environments and support long-term continuous operation.
AMAT Applied Materials 0120-90146量规控制器模块 产品展示
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| R65GENA-R2-NS-NV-00 | CACR-SR30TZ0SM | 061-05472-0000 |
| R65GENA-NP-RW-VS-02 | CACR-SR44TH9SF-Y03AV | 067-11217-0001 |
| R65GENA-NP-RW-VS-00 | CACR-SR20BE12G-E | 061-01262-0020 |
| R65GEAP-R2-NS-NV-00 | CACR-SR03TZ6SM-E | EMC-FDM |
| R65GEAA-R2-NS-VS-00 | CACRSR15SB1AP | SBC38612 |
| R65GEAA-R2-NS-NV-00 | CACR-0401IS4-FK | EXM-HD2 |
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