AMAT Applied Materials 0100-90886伺服控制模块 PDF资料
1.产 品 资 料 介 绍：
AMAT Applied Materials 0100-90886 伺服控制模块
产品概述
0100-90886 是 AMAT 半导体设备中的 伺服控制模块（Servo Control Module），用于控制步进电机或伺服电机，实现高精度位置和速度控制。它主要应用于晶圆搬运、Loadlock 升降机、气动执行器及其他精密机械驱动系统中，是设备自动化和工艺精度的重要组成部分。
技术功能与特点
高精度运动控制
支持闭环反馈控制，实现位置、速度和加速度精确控制。
可配合编码器或位置传感器，实现微米级定位。
多轴协同控制
支持单轴或多轴协作控制，适应复杂机械动作序列。
可与设备控制器同步，执行自动化工艺程序。
安全与保护机制
内置过流、过压、过热保护，防止电机或设备损坏。
可与设备互锁系统联动，确保晶圆搬运安全。
模块化设计
支持快速安装、拆卸和更换，便于设备维护与升级。
设计符合半导体洁净室标准，适合长期连续运行。
应用领域
晶圆搬运系统
控制 Loadlock 升降机、机械手臂和传输装置，实现晶圆精确搬运。
气动和机械执行器驱动
与气动模块配合，实现阀门、气缸及精密机械动作的精确控制。
半导体工艺设备自动化
配合控制器和 PCB 模块，实现设备多轴同步操作，提高工艺一致性。
辅助设备驱动
控制小型步进或伺服电机驱动冷却风扇、皮带传输及定位机构等辅助设备。
AMAT Applied Materials 0100-90886伺服控制模块 英文资料：
AMAT Applied Materials 0100-90886 Servo Control Module
Product Overview
0100-90886 is a servo control module in AMAT semiconductor equipment, used to control stepper motors or servo motors, achieving high-precision position and speed control. It is mainly used in wafer handling, Loadlock elevators, pneumatic actuators, and other precision mechanical drive systems, and is an important component of equipment automation and process accuracy.
Technical functions and features
High precision motion control
Support closed-loop feedback control to achieve precise control of position, velocity, and acceleration.
Can be combined with encoders or position sensors to achieve micrometer level positioning.
Multi axis collaborative control
Support single axis or multi axis collaborative control to adapt to complex mechanical action sequences.
Can synchronize with the device controller to execute automated process programs.
Security and protection mechanisms
Built in overcurrent, overvoltage, and overheating protection to prevent motor or equipment damage.
It can be linked with the device interlock system to ensure the safety of wafer handling.
modular design
Supports quick installation, disassembly, and replacement, facilitating equipment maintenance and upgrades.
Designed to meet semiconductor cleanroom standards and suitable for long-term continuous operation.
Application field
Wafer handling system
Control the Loadlock elevator, robotic arm, and transfer device to achieve precise wafer handling.
Pneumatic and mechanical actuator drive
Cooperate with pneumatic modules to achieve precise control of valves, cylinders, and precision mechanical movements.
Automation of semiconductor process equipment
Cooperate with the controller and PCB module to achieve multi axis synchronous operation of the equipment and improve process consistency.
Auxiliary equipment driver
Control auxiliary equipment such as small stepper or servo motor driven cooling fans, belt conveyors, and positioning mechanisms.
AMAT Applied Materials 0100-90886伺服控制模块 产品展示
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