AMAT Applied Materials ESC-W2电源控制器 PDF资料
1.产 品 资 料 介 绍：
AMAT Applied Materials ESC-W2 电源控制器
产品概述
ESC-W2 是 AMAT 半导体设备中的 电源控制器（Power Supply Controller），专用于管理关键工艺模块的直流和交流电源输出。它通常与静电卡盘（ESC）、加热器、电磁阀或其他关键执行器配合使用，通过精确调节电压和电流，保证半导体工艺过程中晶圆的安全与工艺一致性。
技术功能与特点
精确电源控制
可提供稳定的直流或交流电压、电流输出，满足高精度工艺要求。
支持多通道输出，分别控制不同工艺模块。
监控与保护功能
实时监测输出电压、电流及功率状态。
内置过压、过流、短路保护，并与互锁系统联动，提高晶圆和设备安全性。
接口与通信能力
与设备控制器、PCB、直流电源器等模块无缝连接。
支持远程控制与数据采集，实现自动化生产线集成。
模块化设计
可快速安装、拆卸和更换，便于维护与升级。
设计适应半导体洁净室及连续运作环境。
应用领域
静电卡盘（ESC）系统
控制 ESC 吸附电压，保证晶圆在沉积、刻蚀等工艺过程中的稳定固定。
加热器与温控单元
为热离子加热器、电阻加热器提供精确电源控制，确保工艺温度均匀和可重复。
电磁阀及执行器驱动
管理气动阀门、气体流量控制器等执行器的电源，保证工艺气路精准控制。
半导体自动化生产线
与控制器、直流电源器和 PCB 配合，实现设备整体电源管理和自动化工艺控制。
AMAT Applied Materials 0190-09378单相驱动器 英文资料：
AMAT Applied Materials ESC-W2 Power Controller
Product Overview
ESC-W2 is a power supply controller in AMAT semiconductor equipment, dedicated to managing the DC and AC power outputs of critical process modules. It is typically used in conjunction with electrostatic chucks (ESCs), heaters, solenoid valves, or other critical actuators to ensure wafer safety and process consistency during semiconductor processes by precisely adjusting voltage and current.
Technical functions and features
Accurate power control
It can provide stable DC or AC voltage and current output to meet high-precision process requirements.
Support multi-channel output to control different process modules separately.
Monitoring and protection functions
Real time monitoring of output voltage, current, and power status.
Built in overvoltage, overcurrent, and short-circuit protection, and linked with interlocking systems to improve wafer and equipment safety.
Interface and Communication Capability
Regarding device controllers PCB、 Seamless connection of modules such as DC power supplies.
Support remote control and data collection to achieve automated production line integration.
modular design
It can be quickly installed, disassembled, and replaced, making it easy to maintain and upgrade.
Design to adapt to semiconductor cleanrooms and continuous operation environments.
Application field
Electrostatic Chuck (ESC) System
Control the ESC adsorption voltage to ensure stable fixation of the wafer during deposition, etching, and other processes.
Heater and temperature control unit
Provide precise power control for hot ion heaters and resistance heaters to ensure uniform and repeatable process temperature.
Electromagnetic valve and actuator drive
Manage the power supply of pneumatic valves, gas flow controllers, and other actuators to ensure precise control of the process gas path.
Semiconductor automation production line
Collaborate with controllers, DC power supplies, and PCBs to achieve overall power management and automated process control of the equipment.
AMAT Applied Materials 0190-09378单相驱动器 产品展示
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| R67GENA-R2-NS-NV-00 | CACR-IR050505F | 11901 |
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