AMAT Applied Materials 0190-09378单相驱动器 PDF资料
1.产 品 资 料 介 绍：
AMAT Applied Materials 0190-09378 单相驱动器
产品概述
0190-09378 是 AMAT 半导体设备中的 单相驱动器（Single-Phase Drive Unit），主要用于为小功率交流负载或单相电机提供稳定驱动。该驱动器通常用于工艺设备的气动泵、电磁阀、冷却风扇或其他低功率单相电机，实现精确控制和设备稳定运行。
技术功能与特点
稳定单相驱动
提供单相交流电源的稳压驱动，确保负载设备稳定运行。
支持调速、启停及方向控制（根据负载类型）。
多保护机制
内置过流、过压、短路及过温保护，保证设备和晶圆安全。
可与设备控制器联动，实现互锁保护。
兼容性与接口设计
模块化设计，可快速与控制器、电源模块及负载设备连接。
适配 AMAT 半导体设备内标准单相负载接口。
高可靠性
适应半导体设备高洁净、长时间连续运行环境。
低噪音设计，适用于洁净室工艺环境。
应用领域
气动泵与小功率驱动器
驱动气动泵、气动阀门或真空辅助装置，实现工艺气路控制。
冷却系统
驱动风扇或小型液冷泵，为腔体、热离子加热器或升降机提供温控。
晶圆搬运系统
驱动 Loadlock 或升降机的小功率电机，实现晶圆安全搬运。
自动化生产线辅助设备
驱动传输皮带、定位机构或辅助机械，实现自动化动作与工艺同步。
AMAT Applied Materials 0190-09378单相驱动器 英文资料：
AMAT Applied Materials 0190-09378 single-phase driver
Product Overview
0190-09378 is a single-phase drive unit in AMAT semiconductor equipment, mainly used to provide stable drive for low-power AC loads or single-phase motors. This driver is typically used for pneumatic pumps, solenoid valves, cooling fans, or other low-power single-phase motors in process equipment to achieve precise control and stable operation of the equipment.
Technical functions and features
Stable single-phase drive
Provide stable voltage drive for single-phase AC power supply to ensure stable operation of load equipment.
Support speed regulation, start stop, and direction control (based on load type).
Multiple protection mechanisms
Built in overcurrent, overvoltage, short circuit, and over temperature protection to ensure equipment and wafer safety.
Can be linked with the device controller to achieve interlock protection.
Compatibility and Interface Design
Modular design allows for quick connection with controllers, power modules, and load devices.
Adapt to the standard single-phase load interface within AMAT semiconductor equipment.
high reliability
Adapt to the high cleanliness and long-term continuous operation environment of semiconductor equipment.
Low noise design, suitable for cleanroom process environments.
Application field
Pneumatic pump and low-power driver
Drive pneumatic pumps, pneumatic valves, or vacuum assist devices to achieve process gas path control.
cooling system
Drive fans or small liquid cooled pumps to provide temperature control for chambers, thermal ion heaters, or elevators.
Wafer handling system
Drive low-power motors for Loadlock or elevators to achieve safe wafer handling.
Automated production line auxiliary equipment
Drive transmission belts, positioning mechanisms, or auxiliary machinery to achieve automated actions and process synchronization.
AMAT Applied Materials 0190-09378单相驱动器 产品展示
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