AMAT Applied Materials 0900-01053过滤器 PDF资料
1.产 品 资 料 介 绍：
产品概述
AMAT 0900-01053 过滤器是应用于半导体制造设备中的高精度净化组件，主要用于去除气体或液体中的颗粒、杂质和污染物。该模块在半导体工艺中保障气体供应、化学品输送及真空环境的纯净度，从而提升制程良率和设备可靠性。
技术参数
过滤对象：工艺气体 / 工艺化学液体
过滤精度：可达亚微米级甚至纳米级（根据工艺需求）
安装方式：模块化接口设计，便于在 AMAT 系统中更换
工作环境：适配高洁净、腐蚀性气体或高温条件
寿命周期：长寿命设计，可耐受连续工艺运行
应用领域
气体供应系统
应用于 CVD、PVD、ALD 等设备的 气体输送管路，确保反应气体纯净无颗粒污染。
用于 MFC（质量流量控制器）前端过滤，避免颗粒进入质量控制单元。
化学品输送系统
对光刻胶、湿法刻蚀液、清洗液等化学品进行过滤，防止杂质影响晶圆表面处理。
保证 CMP（化学机械抛光）浆料的稳定性和均匀性。
真空与气体排放系统
在真空泵入口处安装，防止粉尘或化学副产物进入泵体。
在尾气处理系统中去除有害颗粒物，确保排放达标。
在线监控与维护
结合 AMAT 设备的工艺监控系统，确保气体与液体输送过程长期稳定。
适用于 高端逻辑芯片、存储器、显示面板生产线 等关键工艺。
AMAT Applied Materials 0900-01053过滤器 英文资料：
Product Overview
AMAT 0900-01053 filter is a high-precision purification component used in semiconductor manufacturing equipment, mainly for removing particles, impurities, and pollutants from gases or liquids. This module ensures the purity of gas supply, chemical transportation, and vacuum environment in semiconductor processes, thereby improving process yield and equipment reliability.
Technical Specifications
Filter object: process gas/process chemical liquid
Filtering accuracy: up to sub micron or even nanometer level (depending on process requirements)
Installation method: Modular interface design, easy to replace in AMAT system
Work environment: Suitable for high cleanliness, corrosive gases, or high temperature conditions
Life cycle: Long life design, able to withstand continuous process operation
Application field
gas supply system
Gas delivery pipelines used in CVD, PVD, ALD and other equipment ensure the purity of reaction gases without particle contamination.
Used for front-end filtration of MFC (Mass Flow Controller) to prevent particles from entering the quality control unit.
Chemical conveying system
Filter chemicals such as photoresist, wet etching solution, and cleaning solution to prevent impurities from affecting wafer surface treatment.
Ensure the stability and uniformity of CMP (chemical mechanical polishing) slurry.
Vacuum and gas emission system
Install at the inlet of the vacuum pump to prevent dust or chemical by-products from entering the pump body.
Remove harmful particulate matter in the exhaust treatment system to ensure emissions meet standards.
Online monitoring and maintenance
Combined with the process monitoring system of AMAT equipment, ensure long-term stability of gas and liquid transportation processes.
Suitable for key processes such as high-end logic chips, memory, and display panel production lines.
AMAT Applied Materials 0900-01053过滤器 产品展示
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| SGC 120 | AMAT 0100-09291 | 5716075-P DSDX452 ABB |
| SGC 110 | AMAT 0100-90859 | 57310255-AX DSRF181A ABB |
| SDO-0824 FC-SDO-0824 | AMAT 0100-35172 | 57520001-FE DSTC 408 ABB |
| SDI-1624 FC-SDI-1624 | AMAT 0100-00730 | PFEA 113-65.1PXC |
| SC756A-001-02 | AMAT 0100-09063 | PFCL 301E-0.5 |
| SC756A-001-01 | AMAT 0100-09235 | PFCL201C20KN |
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