AMAT Applied Materials 0100-90468充电电压 PCB 卡 PDF资料
1.产 品 资 料 介 绍：
AMAT Applied Materials 0100-90468 充电电压 PCB 卡
产品概述
0100-90468 是 AMAT 半导体设备中的 充电电压印刷电路板（Charge Voltage PCB Card）。它主要用于提供、调节和监控工艺过程中所需的充电电压，作为设备电源与工艺模块之间的接口电路板。该板卡在等离子体工艺、静电卡盘（ESC）控制、离子源和射频电源辅助模块中具有关键作用。
技术功能与特点
电压产生与调节
提供稳定的直流或脉冲充电电压。
电压范围宽，支持低压控制信号到高压工艺电源的调节。
静电卡盘（ESC）供电
向 ESC 提供吸附晶圆所需的直流偏置电压，确保晶圆在工艺中稳定固定。
配合温控与互锁模块，保证晶圆安全。
等离子工艺辅助
在腔体中提供偏置电压，调节离子轰击能量。
促进薄膜沉积、刻蚀速率和均匀性控制。
信号检测与反馈
实时监控输出电压、电流等参数。
将信号反馈给主控系统，形成闭环控制。
安全保护
内置过压、过流保护电路。
异常时可快速切断输出，保护晶圆和设备。
应用领域
CVD（化学气相沉积）设备
用于稳定晶圆固定，保障薄膜沉积的均匀性和可重复性。
PVD（物理气相沉积）设备
通过充电电压调节离子能量，改善薄膜致密度和附着力。
刻蚀设备
控制晶圆表面偏置，精确调节刻蚀速率与选择性。
静电卡盘控制系统
提供 ESC 吸附电压，保证晶圆在真空环境中不发生位置偏移。
AMAT Applied Materials 0100-90468充电电压 PCB 卡 英文资料：
AMAT Applied Materials 0100-90468 Charging Voltage PCB Card
Product Overview
0100-90468 is a Charge Voltage PCB Card in AMAT semiconductor equipment. It is mainly used to provide, regulate, and monitor the charging voltage required during the process, as an interface circuit board between the equipment power supply and the process module. This board plays a critical role in plasma technology, electrostatic chuck (ESC) control, ion source, and RF power supply auxiliary modules.
Technical functions and features
Voltage generation and regulation
Provide stable DC or pulse charging voltage.
Wide voltage range, supporting the adjustment of low-voltage control signals to high-voltage process power supply.
Electrostatic Chuck (ESC) power supply
Provide ESC with the required DC bias voltage for adsorbing wafers to ensure stable fixation of the wafers during the process.
Cooperate with temperature control and interlock modules to ensure wafer safety.
Plasma assisted process
Provide bias voltage in the cavity to regulate ion bombardment energy.
Promote thin film deposition, etching rate, and uniformity control.
Signal detection and feedback
Real time monitoring of output voltage, current, and other parameters.
Feedback the signal to the main control system to form a closed-loop control.
safety protection
Built in overvoltage and overcurrent protection circuits.
In case of abnormalities, the output can be quickly cut off to protect the wafer and equipment.
Application field
CVD (Chemical Vapor Deposition) equipment
Used for stabilizing wafer fixation, ensuring uniformity and repeatability of thin film deposition.
PVD (Physical Vapor Deposition) equipment
By adjusting the ion energy through charging voltage, the density and adhesion of the film can be improved.
Etching equipment
Control wafer surface bias, accurately adjust etching rate and selectivity.
Electrostatic Chuck Control System
Provide ESC adsorption voltage to ensure that the wafer does not shift in position in a vacuum environment.
AMAT Applied Materials 0100-90468充电电压 PCB 卡 产品展示
3.其他产品
UCD224A103 直流电源板
UCD224A102 调压卡模块
UCD208A101 直流输入模块
4.其他英文产品
ABB YB560103-CN DSQC243 Input logic module
ABB YL787001-AE Output logic module
ABB YT212001-AB Serial Link Controller
| SR3642-4822-84-7-48C-CU | SE10000-000000 | PFBL141B/C |
| SR3642-4822-7-CU | AMAT 0100-09017 | IMHSS03 |
| SR3642-4822-7-56HC-CU | AMAT 0100-35057 | 57310290-BY DSIH70 ABB |
| SR3642-4822-7-56BC-CV | AMAT 0100-00062 | 26390582-BR DSTK127 ABB |
| SR3642-4822-7-56BC-CU | AMAT 0100-76295 | 57310255-AL DSRF182 ABB |
| SR3642-4822-56BC-CU | AMAT 0100-00063 | DSDI452 ABB |
| SR3640-8634-7-56 | AMAT 0100-35414 | PFEA111 |
本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs
