AMAT Applied Materials 0190-48891双丝热离子计 PDF资料
1.产 品 资 料 介 绍：
产品概述
AMAT 0190-48891 双丝热离子计（Dual Filament Hot Ion Gauge）用于高真空环境下的压力测量，广泛应用于半导体制造设备，如 HDP100 系统。
技术特点
型号：0190-48891
类型：双丝热离子计
适用设备：AMAT HDP100 系统
压力测量范围：0.8 至 10 Torr
输出信号：0.8 至 10 V
双丝加热技术：提高测量精度和设备耐用性
高可靠性：设计用于长期使用，减少停机时间和维护成本
易于集成：可轻松安装到现有系统
精确真空测量：提供一致的测量值，保证工艺控制优化
应用领域
半导体制造设备：用于高真空环境下的压力测量，确保设备运行稳定
工业真空系统：用于监控和控制工业真空系统压力
实验室真空设备：提供实时压力数据，支持实验室设备操作
注意事项
兼容性：确保与现有设备接口匹配
安装要求：注意电气连接和通道配置
维护保养：定期检查功能，确保测量精度和设备稳定性
AMAT Applied Materials 0190-48891双丝热离子计 英文资料：
Product Overview
The AMAT 0190-48891 Dual Filament Hot Ion Gauge is used for pressure measurement in high vacuum environments and is widely used in semiconductor manufacturing equipment such as the HDP100 system.
Technical Features
Model: 0190-48891
Type: Double wire thermionic meter
Applicable equipment: AMAT HDP100 system
Pressure measurement range: 0.8 to 10 Torr
Output signal: 0.8 to 10 V
Double wire heating technology: improving measurement accuracy and equipment durability
High reliability: designed for long-term use, reducing downtime and maintenance costs
Easy to integrate: can be easily installed into existing systems
Accurate vacuum measurement: providing consistent measurement values to ensure process control optimization
Application field
Semiconductor manufacturing equipment: used for pressure measurement in high vacuum environments to ensure stable equipment operation
Industrial vacuum system: used for monitoring and controlling the pressure of industrial vacuum systems
Laboratory vacuum equipment: provides real-time pressure data and supports laboratory equipment operation
Precautions
Compatibility: Ensure compatibility with existing device interfaces
Installation requirements: Pay attention to electrical connections and channel configuration
Maintenance: Regularly check functions to ensure measurement accuracy and equipment stability
AMAT Applied Materials 0190-48891双丝热离子计 产品展示
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