AMAT Applied Materials 0010-76086水阀门组件 PDF资料
1.产 品 资 料 介 绍：
产品概述
AMAT 0010-76086 是半导体设备中的水阀门组件（Water Valve Assembly），用于精密液体控制系统，负责液体的分配、切换和流量调节，保障设备的冷却和工艺液体管理。
技术特点
多通道设计：支持多个通道的液体分配和切换，适应复杂流体系统。
高纯度材质：采用高纯度不锈钢等材料，兼容半导体工艺环境，避免污染。
精密控制：通过阀门精确调节液体流量和压力。
紧凑结构：设计紧凑，便于在空间有限的设备中安装。
应用领域
化学气相沉积（CVD）系统
控制反应室的冷却和液体流路。
物理气相沉积（PVD）系统
管理靶材和反应室的温度与液体流量。
化学机械抛光（CMP）系统
分配抛光液并维持冷却系统稳定。
刻蚀（Etch）系统
冷却刻蚀室，保证工艺液体流量精确。
注意事项
兼容性：确保接口和规格与现有设备匹配。
维护与清洁：定期检查和清洁阀门组件，防止杂质堵塞。
性能监控：监控液体流量和压力，及时排查异常。
安装方向：确认阀门组件安装方向正确，保证液体流向符合设计要求。
AMAT Applied Materials 0010-76086水阀门组件 英文资料：
Product Overview
AMAT 0010-76086 is a water valve assembly in semiconductor equipment, used for precision liquid control systems, responsible for liquid distribution, switching, and flow regulation, ensuring equipment cooling and process liquid management.
Technical Features
Multi channel design: supports liquid distribution and switching across multiple channels, adapting to complex fluid systems.
High purity material: Made of high-purity stainless steel and other materials, compatible with semiconductor process environment, avoiding pollution.
Precision control: Accurately adjust liquid flow and pressure through valves.
Compact structure: Designed to be compact and easy to install in devices with limited space.
Application field
Chemical Vapor Deposition (CVD) System
Control the cooling and liquid flow path of the reaction chamber.
Physical Vapor Deposition (PVD) System
Manage the temperature and liquid flow rate of the target material and reaction chamber.
Chemical Mechanical Polishing (CMP) System
Distribute polishing solution and maintain stable cooling system.
Etch system
Cool the etching chamber to ensure precise flow of process liquid.
Precautions
Compatibility: Ensure that the interface and specifications match the existing devices.
Maintenance and Cleaning: Regularly inspect and clean valve components to prevent impurities from clogging.
Performance monitoring: Monitor liquid flow and pressure, and promptly identify any abnormalities.
Installation direction: Confirm that the valve components are installed in the correct direction to ensure that the liquid flow direction meets the design requirements.
AMAT Applied Materials 0010-76086水阀门组件 产品展示
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| SR3632-8292-84-56HC-CU | 531X307LTBAFG1 | IC3600TPSA1 |
| SR3632-8292-84-56HC | 531X307LTBACG1 | IC3600TPGD1A |
| SR3632-8292-7-56HC | 531X306LCCBKM1 | IC3600TPGD1 |
| SR3632-8292-7-56BC-CU | 531X306LCCBFM1 | IC3600TPGA1 |
| SR3632-4336-7-48C | 531X306LCCBEM2 | IC3600TPCD1A |
| SR3632-382-2-48B | AMAT 0100-90697 | IC3600TPAM1 |
| SR3632-2094-48B | AMAT 0100-00039 | 26390582-BM DSTK129 ABB |
| SR3624-8291-7-56BC-CU-250210 | AMAT 0100-00736 | 57520001-A DSTC120 ABB |
| SR3624-8291-7-56BC-CU | AMAT 0100-00669 | PFEA 113-65.2PXC |
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