AMAT Applied Materials 03-83601-00主板组件 PDF资料
1.产 品 资 料 介 绍：
产品概述
AMAT 03-83601-00 是半导体设备中使用的主板组件（Motherboard），承担核心控制和信号处理功能，负责协调设备内部各模块的工作。
技术特点与功能
核心控制：处理设备的操作指令，协调各个模块运行。
信号处理：接收并处理来自传感器和执行器的信号，确保精确运行。
通信接口：提供与其他设备或系统的数据交换接口，支持远程监控。
电源管理：分配和管理内部电源，保证模块稳定供电。
应用领域
化学气相沉积（CVD）系统
控制薄膜沉积过程中的气体和反应条件。
物理气相沉积（PVD）系统
控制金属薄膜沉积和图案化工艺。
化学机械抛光（CMP）系统
负责晶圆表面平坦化过程的控制。
刻蚀（Etch）系统
精密控制刻蚀工艺中的气体、温度及设备动作。
注意事项
兼容性：确认主板与现有设备型号和版本兼容。
状态确认：大多数为二手件，购买前需确认功能和外观。
售后服务：了解供应商是否提供技术支持或维护服务。
AMAT Applied Materials 03-83601-00主板组件 英文资料：
Product Overview
AMAT 03-83601-00 is a motherboard component used in semiconductor equipment, responsible for core control and signal processing functions, and coordinating the work of various modules within the equipment.
Technical features and functions
Core control: Processing device operation instructions and coordinating the operation of various modules.
Signal processing: Receive and process signals from sensors and actuators to ensure precise operation.
Communication interface: Provides a data exchange interface with other devices or systems, supporting remote monitoring.
Power management: Allocate and manage internal power sources to ensure stable power supply to modules.
Application field
Chemical Vapor Deposition (CVD) System
Control the gas and reaction conditions during the thin film deposition process.
Physical Vapor Deposition (PVD) System
Control the deposition and patterning processes of metal thin films.
Chemical Mechanical Polishing (CMP) System
Responsible for controlling the process of wafer surface planarization.
Etch system
Precise control of gas, temperature, and equipment actions in the etching process.
Precautions
Compatibility: Confirm that the motherboard is compatible with the existing device model and version.
Status confirmation: Most of them are second-hand items, and the functionality and appearance need to be confirmed before purchase.
After sales service: Understand whether the supplier provides technical support or maintenance services.
AMAT Applied Materials 03-83601-00主板组件 产品展示
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| SR3642-4822-7-56BC-CV | AMAT 0100-00062 | 26390582-BR DSTK127 ABB |
| SR3642-4822-7-56BC-CU | AMAT 0100-76295 | 57310255-AL DSRF182 ABB |
| SR3642-4822-56BC-CU | AMAT 0100-00063 | DSDI452 ABB |
| SR3640-8634-7-56 | AMAT 0100-35414 | PFEA111 |
| SR3640-852-56C | AMAT 0100-01739 | 57160001-AK DSDO120 ABB |
| SR3640-8364-7-56C | AMAT 0100-91103 | 26390582-BL DSTK128 ABB |
| SR3640-8354-7-56C | AMAT 0100-00086 | 57310001-CC DSPC171 ABB |
| SR3640-8293-7-56HC | AMAT 0100-00109 | PFCL 201CE-50.0KN |
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