AMAT Applied Materials 0050-30838焊接阀组 PDF资料
1.产 品 资 料 介 绍：
产品概述
AMAT 0050-30838 焊接阀组（Weldment Valve Manifold 3 Station Left）是半导体设备中用于精密流体控制的组件。它负责多通道气体或液体的分配与切换，保证工艺流体系统的稳定性和可靠性。
技术参数（基于命名推测）
型号：0050-30838
类型：三通道焊接阀组（3 Station Weldment Valve Manifold）
安装方向：左侧（Left）
材质：高纯度不锈钢，适用于高纯气体或液体
功能：多通道流体分配、阀门切换、流路控制
应用领域
半导体制造设备
精密气体或液体的分配和切换，保证工艺流体管理准确无误。
化学气相沉积（CVD）和物理气相沉积（PVD）系统
控制反应气体的流量与分配，确保沉积均匀性。
化学机械抛光（CMP）系统
管理抛光液或辅助液体的流动，保持工艺稳定。
产品优势
多通道设计：支持三通道流体分配，提高系统灵活性。
焊接结构：密封性和结构稳定性高，减少泄漏风险。
高纯度材质：符合半导体行业对材料的严格要求。
紧凑型设计：节省设备内部空间，方便安装。
AMAT Applied Materials 0050-30838焊接阀组 英文资料：
Product application areas
1. Chemical mechanical polishing (CMP) system
Heat exchangers are mainly used for temperature control of CMP process liquids, such as polishing liquids.
The CMP process is highly sensitive to temperature, and changes in liquid temperature directly affect material removal rate (MRR) and polishing uniformity.
Maintain stable temperature through a heat exchanger to ensure surface flatness and process consistency of silicon wafers.
2. Cooling of semiconductor manufacturing equipment
Used for thermal management of key internal components of equipment, such as motor drive modules, pumps, control valves, or polishing heads.
Prevent local overheating from causing process deviations or equipment damage.
Can be used in conjunction with circulating water systems, coolant systems, or constant temperature liquid systems.
3. Precision gas or liquid management system
In semiconductor equipment, some gas or liquid circuits require stable temperature conditions to maintain flow accuracy and reaction consistency.
The heat exchanger adjusts the temperature of the circuit through thermal balance to improve system stability.
4. Laboratory and R&D process
In material research and development or semiconductor process experiments, heat exchangers can control the liquid temperature of small-scale experimental devices to ensure reliable experimental data.
Support rapid change of process conditions, suitable for testing multiple process parameters.
5. Temperature safety protection for production lines
Heat exchangers can prevent liquids or gases from overheating, avoiding equipment failures or safety accidents.
Improve the reliability and capacity stability of the entire production line.
AMAT Applied Materials 0050-30838焊接阀组 产品展示
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