AMAT Applied Materials 0010-00557热交换器 PDF资料
1.产 品 资 料 介 绍：
产品应用领域
1. 化学机械抛光（CMP）系统
热交换器主要用于 CMP 工艺液体（如抛光液）的温度控制。
CMP 工艺对温度非常敏感，液体温度变化会直接影响材料去除率（MRR）和抛光均匀性。
通过热交换器维持稳定温度，确保硅片表面平整度和工艺一致性。
2. 半导体制造设备冷却
用于设备内部关键部件的热管理，如电机驱动模块、泵浦、控制阀或抛光头。
防止局部过热导致工艺偏差或设备损坏。
可与循环水系统、冷却液系统或恒温液系统配合使用。
3. 精密气体或液体管理系统
在半导体设备中，部分气体或液体回路需要温度稳定的条件才能保持流量精度和反应一致性。
热交换器通过冷热平衡调节回路温度，提高系统稳定性。
4. 实验室与研发工艺
在材料研发或半导体工艺实验中，热交换器可以控制小规模试验装置的液体温度，确保实验数据可靠。
支持快速更换工艺条件，适合多工艺参数测试。
5. 生产线温度安全保护
热交换器可防止液体或气体过热，避免设备故障或安全事故。
提升整个生产线的可靠性与产能稳定性。
AMAT Applied Materials 0010-00557热交换器 英文资料：
Product application areas
1. Chemical mechanical polishing (CMP) system
Heat exchangers are mainly used for temperature control of CMP process liquids, such as polishing liquids.
The CMP process is highly sensitive to temperature, and changes in liquid temperature directly affect material removal rate (MRR) and polishing uniformity.
Maintain stable temperature through a heat exchanger to ensure surface flatness and process consistency of silicon wafers.
2. Cooling of semiconductor manufacturing equipment
Used for thermal management of key internal components of equipment, such as motor drive modules, pumps, control valves, or polishing heads.
Prevent local overheating from causing process deviations or equipment damage.
Can be used in conjunction with circulating water systems, coolant systems, or constant temperature liquid systems.
3. Precision gas or liquid management system
In semiconductor equipment, some gas or liquid circuits require stable temperature conditions to maintain flow accuracy and reaction consistency.
The heat exchanger adjusts the temperature of the circuit through thermal balance to improve system stability.
4. Laboratory and R&D process
In material research and development or semiconductor process experiments, heat exchangers can control the liquid temperature of small-scale experimental devices to ensure reliable experimental data.
Support rapid change of process conditions, suitable for testing multiple process parameters.
5. Temperature safety protection for production lines
Heat exchangers can prevent liquids or gases from overheating, avoiding equipment failures or safety accidents.
Improve the reliability and capacity stability of the entire production line.
AMAT Applied Materials 0010-00557热交换器 产品展示
3.其他产品
KUC755AE105 驱动电源
KUC321AE 伺服控制器
HESG216882A 控制器单元
4.其他英文产品
TRICONEX 4409S Channel contact module
TRICONEX 4500 Voltage monitoring module
TRICONEX 4507 Channel isolation module
| SRF3643-4593-7-56C | SC403-001-T2 | SC755A-040-08 |
| SRF3643-4593-7-5-56C | SC403-002-T2 | SC754B-001-01 |
| SRF3643-4533-7-5-56C | SC402-023-TC | SC756B-001-02 |
| SRF3632-5265-84-5-56BC-CU | SC403-002 | SC752A-001-01 |
| SRF3632-5227-84-5-56BC-CU | SC403-013 | SC753A-010-02 |
| SR5348-4592-45B | SC403-012-T2 | SC943T200101 |
| SR5340-5370-4-45B | SC403-004-T3 | SC903NN-033-01 |
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